Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation - dataset

Andrew Robert Gibson (Creator)
Timo Gans (Creator)

Physics

Dataset

Date made available	10 Oct 2017
Publisher	University of York

Contact

[email protected]

DOI
10.15124/43fb0bda-5f85-4c6e-b97d-0cceb54e554d

Access Dataset

Gibson2017a_PureData.zip
File: multipart/x-zip, 526 KB
Type: Dataset
Licence: CC BY

1 Article

Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation
Gibson, A. R. & Gans, T., 24 Oct 2017, In: Plasma sources science & technology. 26, 11, 12 p., 115007.
Research output: Contribution to journal › Article › peer-review

Open Access
File

1 Finished

Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Gans, T. (Principal investigator), O'Connell, D. (Co-investigator) & Wagenaars, E. (Co-investigator)
EPSRC
1/07/13 → 21/12/18
Project: Research project (funded) › Research

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