EPSRC IAA: High-brightness focused ion beams for micromachining semi-conductor materials

Project: Other project (funded)Restricted grant

Project Details

Description

In collaboration with Oregon Physics, we undertook optical emission spectroscopy and 2D fluid-kinetic simulations to investigate the production of negative ions of oxygen in plasma-based focused ion beams for application to advanced manufacturing.
StatusFinished
Effective start/end date17/06/1920/12/19

Funding

  • EPSRC: £7,516.00