Metrology concepts for a new generation of plasma manufacturing with atom-scale precision

Gans, Timo (Principal investigator)
O'Connell, Deborah (Co-investigator)
Wagenaars, Erik (Co-investigator)

Physics

Project: Research project (funded) › Research

7 Conference participation
4 Invited talk
1 Seminar/workshop/course

1 results
- Title
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78th IUVSTA Workshop
Wagenaars, E. (Invited speaker)
5 Oct 2015 → 9 Oct 2015
Activity: Participating in or organising an event › Seminar/workshop/course