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Metrology concepts for a new generation of plasma manufacturing with atom-scale precision

Project: Research project (funded)Research

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StatusFinished
Effective start/end date1/07/1321/12/18

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Metrology concepts for a new generation of plasma manufacturing with atom-scale precision

Gans, T., O'Connell, D. & Wagenaars, E.

EPSRC: £1,254,801.00

1/07/1321/12/18

Award date: 22/02/13

Award: UK Research Councils

Funding

  • EPSRC: £1,254,801.00

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