A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL

Milind Pandit; Guillermo Sobreviela; Callisto Pili; Philipp Steinmann; Douglas Young; Chun Zhao; Colin Baker; Ashwin Seshia

doi:10.1109/INERTIAL51137.2021.9430455

A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL

Milind Pandit, Guillermo Sobreviela, Callisto Pili, Philipp Steinmann, Douglas Young, Chun Zhao, Colin Baker, Ashwin Seshia

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Optimization of the oscillator front-end for resonant sensors is critical to addressing key metrics such as noise floor and output stability. This paper reports a method to improve the noise floor of resonant MEMS accelerometers by avoiding aliasing of high-frequency seismic noise for long-period measurements. In particular, the optimization of a Phase Locked Loop (PLL) front-end is employed for continuous tracking of the output. A noise floor improvement of 13x is seen in comparison to the case with no anti-aliasing control. A custom PLL is designed to mitigate the impact of high-frequency noise enabling the realization of a resonant accelerometer sensor module with a noise floor of 10 ng/√Hz.

Original language	English
Title of host publication	INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
Publisher	IEEE
ISBN (Electronic)	9781728150994
DOIs	https://doi.org/10.1109/INERTIAL51137.2021.9430455
Publication status	Published - 25 May 2021
Event	8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021 - Virtual, Kailua-Kona, United States Duration: 22 Mar 2021 → 25 Mar 2021

Publication series

Name	INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference	8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021
Country/Territory	United States
City	Virtual, Kailua-Kona
Period	22/03/21 → 25/03/21

Bibliographical note

Publisher Copyright:
© 2021 IEEE.

Keywords

Accelerometer
Anti-aliasing
Inertial Sensors
MEMS
Phase Locked Loop

Access to Document

10.1109/INERTIAL51137.2021.9430455

Cite this

Pandit, M., Sobreviela, G., Pili, C., Steinmann, P., Young, D., Zhao, C., Baker, C., & Seshia, A. (2021). A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL. In INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings Article 9430455 (INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings). IEEE. https://doi.org/10.1109/INERTIAL51137.2021.9430455

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title = "A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL",

abstract = "Optimization of the oscillator front-end for resonant sensors is critical to addressing key metrics such as noise floor and output stability. This paper reports a method to improve the noise floor of resonant MEMS accelerometers by avoiding aliasing of high-frequency seismic noise for long-period measurements. In particular, the optimization of a Phase Locked Loop (PLL) front-end is employed for continuous tracking of the output. A noise floor improvement of 13x is seen in comparison to the case with no anti-aliasing control. A custom PLL is designed to mitigate the impact of high-frequency noise enabling the realization of a resonant accelerometer sensor module with a noise floor of 10 ng/√Hz. ",

keywords = "Accelerometer, Anti-aliasing, Inertial Sensors, MEMS, Phase Locked Loop",

author = "Milind Pandit and Guillermo Sobreviela and Callisto Pili and Philipp Steinmann and Douglas Young and Chun Zhao and Colin Baker and Ashwin Seshia",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021 ; Conference date: 22-03-2021 Through 25-03-2021",

year = "2021",

month = may,

day = "25",

doi = "10.1109/INERTIAL51137.2021.9430455",

language = "English",

series = "INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",

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Pandit, M, Sobreviela, G, Pili, C, Steinmann, P, Young, D, Zhao, C, Baker, C & Seshia, A 2021, A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL. in INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings., 9430455, INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings, IEEE, 8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021, Virtual, Kailua-Kona, United States, 22/03/21. https://doi.org/10.1109/INERTIAL51137.2021.9430455

A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL. / Pandit, Milind; Sobreviela, Guillermo; Pili, Callisto et al.
INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. IEEE, 2021. 9430455 (INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Pandit, Milind

AU - Sobreviela, Guillermo

AU - Pili, Callisto

AU - Steinmann, Philipp

AU - Young, Douglas

AU - Zhao, Chun

AU - Baker, Colin

AU - Seshia, Ashwin

PY - 2021/5/25

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N2 - Optimization of the oscillator front-end for resonant sensors is critical to addressing key metrics such as noise floor and output stability. This paper reports a method to improve the noise floor of resonant MEMS accelerometers by avoiding aliasing of high-frequency seismic noise for long-period measurements. In particular, the optimization of a Phase Locked Loop (PLL) front-end is employed for continuous tracking of the output. A noise floor improvement of 13x is seen in comparison to the case with no anti-aliasing control. A custom PLL is designed to mitigate the impact of high-frequency noise enabling the realization of a resonant accelerometer sensor module with a noise floor of 10 ng/√Hz.

AB - Optimization of the oscillator front-end for resonant sensors is critical to addressing key metrics such as noise floor and output stability. This paper reports a method to improve the noise floor of resonant MEMS accelerometers by avoiding aliasing of high-frequency seismic noise for long-period measurements. In particular, the optimization of a Phase Locked Loop (PLL) front-end is employed for continuous tracking of the output. A noise floor improvement of 13x is seen in comparison to the case with no anti-aliasing control. A custom PLL is designed to mitigate the impact of high-frequency noise enabling the realization of a resonant accelerometer sensor module with a noise floor of 10 ng/√Hz.

KW - Accelerometer

KW - Anti-aliasing

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KW - MEMS

KW - Phase Locked Loop

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M3 - Conference contribution

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BT - INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

PB - IEEE

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Pandit M, Sobreviela G, Pili C, Steinmann P, Young D, Zhao C et al. A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL. In INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. IEEE. 2021. 9430455. (INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings). doi: 10.1109/INERTIAL51137.2021.9430455

A 10 NANO-G/RT-HZ RESONANT MEMS ACCELEROMETER EMPLOYING ANTI-ALIASING CONTROL

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

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