A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation

Lei Xu; Jingqian Xi; Lu Gao; Fangzheng Li; Jianyuan Pi; Chengxin Li; Kunfeng Wang; Xingyin Xiong; Yuan Wang; Huafeng Liu; Xudong Zou; Chun Zhao

doi:10.1109/JMEMS.2022.3183021

A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation

Lei Xu, Jingqian Xi, Lu Gao, Fangzheng Li, Jianyuan Pi, Chengxin Li, Kunfeng Wang, Xingyin Xiong, Yuan Wang, Huafeng Liu, Xudong Zou, Chun Zhao

Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Journal of Microelectromechanical Systems
DOIs	https://doi.org/10.1109/JMEMS.2022.3183021
Publication status	Published - 22 Jun 2022

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10.1109/JMEMS.2022.3183021

SideBandExcitation_withHighlight_thirdround Accepted author manuscript, 2.6 MB

Cite this

@article{3dd18529c7e14826bf3d85a970f33ca0,

title = "A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation",

author = "Lei Xu and Jingqian Xi and Lu Gao and Fangzheng Li and Jianyuan Pi and Chengxin Li and Kunfeng Wang and Xingyin Xiong and Yuan Wang and Huafeng Liu and Xudong Zou and Chun Zhao",

year = "2022",

month = jun,

day = "22",

doi = "10.1109/JMEMS.2022.3183021",

language = "English",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

}

TY - JOUR

T1 - A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation

AU - Xu, Lei

AU - Xi, Jingqian

AU - Gao, Lu

AU - Li, Fangzheng

AU - Pi, Jianyuan

AU - Li, Chengxin

AU - Wang, Kunfeng

AU - Xiong, Xingyin

AU - Wang, Yuan

AU - Liu, Huafeng

AU - Zou, Xudong

AU - Zhao, Chun

PY - 2022/6/22

Y1 - 2022/6/22

U2 - 10.1109/JMEMS.2022.3183021

DO - 10.1109/JMEMS.2022.3183021

M3 - Article

SN - 1057-7157

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

ER -