A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler

TY - JOUR

T1 - A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler

AU - Zhang, Hemin

AU - Sobreviela, Guillermo

AU - Chen, Dongyang

AU - Pandit, Milind

AU - Sun, Jiangkun

AU - Zhao, Chun

AU - Seshia, Ashwin

N1 - Funding Information: Manuscript received July 24, 2020; revised August 25, 2020; accepted August 27, 2020. Date of publication August 31, 2020; date of current version September 25, 2020. This work was supported in part by the Innovate U.K., in part by the Natural Environment Research Council, U.K., and in part by the Silicon Microgravity Ltd. The review of this letter was arranged by Editor D. G. Senesky. (Corresponding author: Hemin Zhang.) Hemin Zhang, Dongyang Chen, Jiangkun Sun, and Ashwin Seshia are with the Nanoscience Centre, University of Cambridge, Cambridge CB3 0FF, U.K. (e-mail: [email protected]). Publisher Copyright: © 1980-2012 IEEE.

PY - 2020/8/31

Y1 - 2020/8/31

N2 - An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower the coupling factor of the coupled resonators thus improving the parametric amplitude ratio sensitivity, a stiff anchor support is employed as a mechanical coupler between resonators. A coupling factor of 7.4\times 10^{-5} was obtained, which is so far the lowest mechanical coupling factor that has been reported for weakly coupled MEMS sensors. As a result, the proposed mode-localized accelerometer demonstrates an input-referred bias instability as high as 280ng within an integration time from 3s to 300s, and an input-referred noise floor of 250ng/ \surd Hz, without utilizing temperature control or other environmental compensation, benchmarking as the highest resolution mode-localized accelerometer to-date. These metrics are comparable to state-of-The-Art MEMS frequency-modulated resonant and capacitive accelerometers while exhibiting superior common-mode rejection to environmental effects.

AB - An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower the coupling factor of the coupled resonators thus improving the parametric amplitude ratio sensitivity, a stiff anchor support is employed as a mechanical coupler between resonators. A coupling factor of 7.4\times 10^{-5} was obtained, which is so far the lowest mechanical coupling factor that has been reported for weakly coupled MEMS sensors. As a result, the proposed mode-localized accelerometer demonstrates an input-referred bias instability as high as 280ng within an integration time from 3s to 300s, and an input-referred noise floor of 250ng/ \surd Hz, without utilizing temperature control or other environmental compensation, benchmarking as the highest resolution mode-localized accelerometer to-date. These metrics are comparable to state-of-The-Art MEMS frequency-modulated resonant and capacitive accelerometers while exhibiting superior common-mode rejection to environmental effects.

KW - accelerometer

KW - coupled resonators

KW - MEMS resonators

KW - Vibration mode localization

UR - http://www.scopus.com/inward/record.url?scp=85092361924&partnerID=8YFLogxK

U2 - 10.1109/LED.2020.3020527

DO - 10.1109/LED.2020.3020527

M3 - Article

AN - SCOPUS:85092361924

SN - 0741-3106

VL - 41

SP - 1560

EP - 1563

JO - Ieee electron device letters

JF - Ieee electron device letters

IS - 10

M1 - 9180273

ER -