Abstract
This paper presents a high-sensitivity microelectromechanical system (MEMS) gravimeter that can operate without a vacuum chamber for long-term earth tide observations. The proposed MEMS gravimeter system can be greatly simplified, including a spring-mass acceleration unit and a controlled temperature environment. To operate without the vacuum chamber, the effect of air buoyancy on the output signal is investigated and corrected in the time domain. A strong correlation between the corrected output of the gravimeter and the theoretical tidal signal is observed. The MEMS gravimeter shows an ultra-low noise floor of 2 Gal/√Hz at 1 Hz and superior stability, indicating the potential for the mass production of MEMS gravimeters that can operate without any vacuum unit.
| Original language | English |
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| Title of host publication | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 |
| Publisher | IEEE |
| Pages | 226-229 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781665412674 |
| DOIs | |
| Publication status | Published - 6 Aug 2021 |
| Event | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States Duration: 20 Jun 2021 → 25 Jun 2021 |
Publication series
| Name | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 |
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Conference
| Conference | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 |
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| Country/Territory | United States |
| City | Virtual, Online |
| Period | 20/06/21 → 25/06/21 |
Bibliographical note
Funding Information:This work was partially supported by The National Key Research and Development Program of China (Grant No. 2018YFC0603301).
Publisher Copyright:
© 2021 IEEE.
Keywords
- Air buoyancy
- Earth tides
- Gravimeter
- Micro-electromechanical system (MEMS)