By the same authors

A High-Sensitivity Mems Gravimeter without a Vacuum Chamber

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Author(s)

  • Xiao Chao Xu
  • Qian Wang
  • Ji'ao Tian
  • Yan Yan Fang
  • Lu Jia Yang
  • Chun Zhao
  • Fangjing Hu
  • Liangcheng Tu

Department/unit(s)

Publication details

Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
DatePublished - 6 Aug 2021
Pages226-229
Number of pages4
PublisherInstitute of Electrical and Electronics Engineers Inc.
Original languageEnglish
ISBN (Electronic)9781665412674

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Abstract

This paper presents a high-sensitivity microelectromechanical system (MEMS) gravimeter that can operate without a vacuum chamber for long-term earth tide observations. The proposed MEMS gravimeter system can be greatly simplified, including a spring-mass acceleration unit and a controlled temperature environment. To operate without the vacuum chamber, the effect of air buoyancy on the output signal is investigated and corrected in the time domain. A strong correlation between the corrected output of the gravimeter and the theoretical tidal signal is observed. The MEMS gravimeter shows an ultra-low noise floor of 2 Gal/√Hz at 1 Hz and superior stability, indicating the potential for the mass production of MEMS gravimeters that can operate without any vacuum unit.

Bibliographical note

Funding Information:
This work was partially supported by The National Key Research and Development Program of China (Grant No. 2018YFC0603301).

Publisher Copyright:
© 2021 IEEE.

    Research areas

  • Air buoyancy, Earth tides, Gravimeter, Micro-electromechanical system (MEMS)

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