Abstract
This paper reports a precision mode-localized accelerometer operating in a higher-order flexural mode. The accelerometer consists of two symmetric resonators coupled by a central rigid coupler to generate an ultra-weak coupling factor. A reduced noise floor is observed when the resonators operate in the higher-order flexural mode compared to the basic lower-order mode. The mode-localized accelerometer working in the fifth-order mode demonstrates an input-referred bias instability of 130 ng and noise floor of 85 ng/surd Hz, which are the best results obtained for accelerometers employing the mode localization paradigm to date. These results indicate that the performance of the mode-localized sensors can be improved by operating at a higher working frequency if the coupling factor and quality factor do not drop significantly. [2020-0365].
| Original language | English |
|---|---|
| Article number | 9354446 |
| Pages (from-to) | 178-180 |
| Number of pages | 3 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 30 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 15 Feb 2021 |
Bibliographical note
Funding Information:Manuscript received November 10, 2020; revised January 5, 2021; accepted February 2, 2021. Date of publication February 15, 2021; date of current version March 16, 2021. This work was supported in part by the Innovate U.K., and in part by the Silicon Microgravity. Subject Editor G. Langfelder. (Corresponding author: Hemin Zhang.) Hemin Zhang, Dongyang Chen, Jiangkun Sun, Madan Parajuli, and Ashwin A. Seshia are with The Nanoscience Centre, Department of Engineering, University of Cambridge, Cambridge CB3 0FF, U.K. (e-mail: [email protected]).
Publisher Copyright:
© 1992-2012 IEEE.
Keywords
- accelerometer
- high-order modes
- MEMS
- mode localization
- Weakly coupled resonators