A low-temperature-operated direct fabrication method for all-solid-state flexible micro-supercapacitors

TY - JOUR

T1 - A low-temperature-operated direct fabrication method for all-solid-state flexible micro-supercapacitors

AU - Wang, Yurong

AU - Sun, Leimeng

AU - Song, Peiyi

AU - Zhao, Chun

AU - Kuang, Shuangyang

AU - Liu, Huafeng

AU - Xiao, Dongyang

AU - Hu, Fangjing

AU - Tu, Liangcheng

N1 - Funding Information: Y. Wang and L. Sun contribute equally to this work. This work was partially supported by the National Key R&D Program of China (Grant No. 2018YFC0603301 ), and the National Natural Science Foundation of China (Grant Nos. 51902112 and 61801185 ). Appendix A Publisher Copyright: © 2019 Elsevier B.V.

PY - 2020/1/20

Y1 - 2020/1/20

N2 - Flexible micro-supercapacitors (MSCs) are promising candidates as miniaturized power sources and energy storage components for next generation wearable electronic devices. Herein, we report a low-temperature-operated (~80∘C) direct fabrication method for the realization of flexible MSCs. To demonstrate the capability of the fabrication method, a flexible MSC based on zinc oxide (ZnO) nanorod/titanium (Ti)/titanium nitride (TiN) core-shell nanostructures and metallic interdigits on a polyethylene terephthalate (PET) substrate was fabricated, with no additional transfer procedure required. The as-produced MSC exhibits increased power (432 W kg−1) and energy (0.24 Wh kg−1) densities, when compared to those of ZnO nanorod based or ZnO seed layer/Ti/TiN based devices. The capacitance retention is over 98% after 5000 cycles, showing an excellent stability. The flexibility of the MSC is tested by bending the device from 0∘ to 180∘, demonstrating nearly identical electrochemical properties for all bending angles. With such a low temperature environment, the proposed fabrication strategy can be applied to other material networks to further improve the performance of MSCs. This method potentially allows for mass production due to its low fabrication complexity, paving the way for the direction fabrication of on-chip MSCs for flexible and wearable devices.

AB - Flexible micro-supercapacitors (MSCs) are promising candidates as miniaturized power sources and energy storage components for next generation wearable electronic devices. Herein, we report a low-temperature-operated (~80∘C) direct fabrication method for the realization of flexible MSCs. To demonstrate the capability of the fabrication method, a flexible MSC based on zinc oxide (ZnO) nanorod/titanium (Ti)/titanium nitride (TiN) core-shell nanostructures and metallic interdigits on a polyethylene terephthalate (PET) substrate was fabricated, with no additional transfer procedure required. The as-produced MSC exhibits increased power (432 W kg−1) and energy (0.24 Wh kg−1) densities, when compared to those of ZnO nanorod based or ZnO seed layer/Ti/TiN based devices. The capacitance retention is over 98% after 5000 cycles, showing an excellent stability. The flexibility of the MSC is tested by bending the device from 0∘ to 180∘, demonstrating nearly identical electrochemical properties for all bending angles. With such a low temperature environment, the proposed fabrication strategy can be applied to other material networks to further improve the performance of MSCs. This method potentially allows for mass production due to its low fabrication complexity, paving the way for the direction fabrication of on-chip MSCs for flexible and wearable devices.

KW - Direct fabrication strategy

KW - Energy storage

KW - Flexible

KW - micro-supercapacitor

UR - http://www.scopus.com/inward/record.url?scp=85075387892&partnerID=8YFLogxK

U2 - 10.1016/j.jpowsour.2019.227415

DO - 10.1016/j.jpowsour.2019.227415

M3 - Article

AN - SCOPUS:85075387892

SN - 0378-7753

VL - 448

JO - Journal of Power Sources

JF - Journal of Power Sources

M1 - 227415

ER -