Abstract
In this paper, for the first time, the mass sensitivity of a 3-DoF mode localized electrostatically coupled resonator is investigated and characterized under atmospheric pressure. A reversible method is used in which nanoparticles are added on and removed from one resonator of the 3-DOF coupled resonator system. Furthermore, a comparison of three mass sensitivity characterization methods was carried out: resonance frequency shift, resonance vibration amplitude change and resonance vibration amplitude ratio. MATLAB/SIMULINK and COMSOL Multiphysics models for the 3-DoF coupled resonator system are presented. The simulation results and theoretical calculations are in good agreement with the experimental data. The results show that a 3-DOF mode localized coupled resonator has potential to be employed for biosensing applications.
| Original language | English |
|---|---|
| Pages (from-to) | 254-262 |
| Number of pages | 9 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 279 |
| Early online date | 20 Jun 2018 |
| DOIs | |
| Publication status | Published - 15 Aug 2018 |
Bibliographical note
Funding Information:This work was supported by Microsys laboratory, Montefiore Institute, University of Liege .
Publisher Copyright:
© 2018 Elsevier B.V.
Keywords
- 3-DOF coupled resonator
- Magnetic nanoparticles
- Mass sensing
- MEMS resonant sensors
- Mode localization
- Reversibility