A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry

Guillermo Sobreviela-Falces; Milind Pandit; Arif Mustafazade; Chun Zhao; Callisto Pili; Colin Baker; Ashwin Seshia

doi:10.1109/MEMS51782.2021.9375431

A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry

Guillermo Sobreviela-Falces, Milind Pandit, Arif Mustafazade, Chun Zhao, Callisto Pili, Colin Baker, Ashwin Seshia

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A differential MEMS vibrating beam accelerometer (VBA) demonstrating excellent stability for seismology and gravimetry applications is presented. The accelerometer response demonstrates excellent linearity over an acceleration range of ±1 g (1 g = 9.8 m s) with a scale factor of 9825 Hz/g. An approximately flat output Allan deviation with an average value of 15 ng is recorded over integration times τ = 1 s - 1000 s with a best-case bias instability of < 10 ng and a noise floor of 10 ng/√H. These results, taken collectively, set new benchmarks for vibrating beam MEMS accelerometers.

Original language	English
Title of host publication	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Publisher	IEEE
Pages	196-199
Number of pages	4
ISBN (Electronic)	9781665419123
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375431
Publication status	Published - 15 Mar 2021
Event	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States Duration: 25 Jan 2021 → 29 Jan 2021

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2021-January
ISSN (Print)	1084-6999

Conference

Conference	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/Territory	United States
City	Virtual, Gainesville
Period	25/01/21 → 29/01/21

Bibliographical note

Publisher Copyright:
© 2021 IEEE.

Keywords

frequency stability
Micromechanical devices
resonators
sensors
thermal stability

Access to Document

10.1109/MEMS51782.2021.9375431

Cite this

Sobreviela-Falces, G., Pandit, M., Mustafazade, A., Zhao, C., Pili, C., Baker, C., & Seshia, A. (2021). A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 (pp. 196-199). Article 9375431 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January). IEEE. https://doi.org/10.1109/MEMS51782.2021.9375431

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title = "A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry",

abstract = "A differential MEMS vibrating beam accelerometer (VBA) demonstrating excellent stability for seismology and gravimetry applications is presented. The accelerometer response demonstrates excellent linearity over an acceleration range of ±1 g (1 g = 9.8 m s) with a scale factor of 9825 Hz/g. An approximately flat output Allan deviation with an average value of 15 ng is recorded over integration times τ = 1 s - 1000 s with a best-case bias instability of < 10 ng and a noise floor of 10 ng/√H. These results, taken collectively, set new benchmarks for vibrating beam MEMS accelerometers.",

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author = "Guillermo Sobreviela-Falces and Milind Pandit and Arif Mustafazade and Chun Zhao and Callisto Pili and Colin Baker and Ashwin Seshia",

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Sobreviela-Falces, G, Pandit, M, Mustafazade, A, Zhao, C, Pili, C, Baker, C & Seshia, A 2021, A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry. in 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021., 9375431, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2021-January, IEEE, pp. 196-199, 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021, Virtual, Gainesville, United States, 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375431

A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry. / Sobreviela-Falces, Guillermo; Pandit, Milind; Mustafazade, Arif et al.
34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. IEEE, 2021. p. 196-199 9375431 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Sobreviela-Falces, Guillermo

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AU - Zhao, Chun

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AB - A differential MEMS vibrating beam accelerometer (VBA) demonstrating excellent stability for seismology and gravimetry applications is presented. The accelerometer response demonstrates excellent linearity over an acceleration range of ±1 g (1 g = 9.8 m s) with a scale factor of 9825 Hz/g. An approximately flat output Allan deviation with an average value of 15 ng is recorded over integration times τ = 1 s - 1000 s with a best-case bias instability of < 10 ng and a noise floor of 10 ng/√H. These results, taken collectively, set new benchmarks for vibrating beam MEMS accelerometers.

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KW - resonators

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KW - thermal stability

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Sobreviela-Falces G, Pandit M, Mustafazade A, Zhao C, Pili C, Baker C et al. A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. IEEE. 2021. p. 196-199. 9375431. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51782.2021.9375431

A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

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