A Mode-Localized Mems Accelerometer in the Modal Overlap Regime Employing Parametric Pump

TY - GEN

T1 - A Mode-Localized Mems Accelerometer in the Modal Overlap Regime Employing Parametric Pump

AU - Zhang, Hemin

AU - Parajuli, Madan

AU - Chen, Dongyang

AU - Sun, Jiangkun

AU - Seshia, Ashwin A.

AU - Pundit, Milind

AU - Sobreviela, Guillermo

AU - Zhao, Chun

N1 - Funding Information: We acknowledge funding support from Innovate UK, the Engineering and Physical Sciences Research Council, and Silicon Microgravity. Publisher Copyright: © 2021 IEEE.

PY - 2021/8/6

Y1 - 2021/8/6

N2 - The principle of vibration mode localization has been been researched in recent years as an approach towards the high accuracy transduction of inertial forces. This transduction scheme comprises of two or more weakly coupled resonators and a low coupling factor is critical in order to enhance parametric sensitivity and consequently resolution. In this paper, we report a new mode-localized accelerometer topology which enables a high amplitude ratio scale factor using a differential acceleration perturbation method. Further, by employing a parametric pump, an adjustable ultra-weak virtual coupling factor is realized where the coupled resonators can operate in the weak coupling regime. In this regime, modal overlap is apparent and the amplitude ratio sensitivity is much improved, by decreasing the pump strength. The experiments show that the amplitude ratio sensitivity of the proposed accelerometer is 9.2/g, and it can be enlarged to as high as 6300/g by employing a parametric pump signal with 100 mV strength, indicating a scale-factor improvement factor of 684. Consequently, the input-referred bias instability is improved from 6.7 g for the case of no parametric pump to 420 ng while employing a parametric pump for operation in the modal-overlap regime, showing an improvement by a factor of 16.

AB - The principle of vibration mode localization has been been researched in recent years as an approach towards the high accuracy transduction of inertial forces. This transduction scheme comprises of two or more weakly coupled resonators and a low coupling factor is critical in order to enhance parametric sensitivity and consequently resolution. In this paper, we report a new mode-localized accelerometer topology which enables a high amplitude ratio scale factor using a differential acceleration perturbation method. Further, by employing a parametric pump, an adjustable ultra-weak virtual coupling factor is realized where the coupled resonators can operate in the weak coupling regime. In this regime, modal overlap is apparent and the amplitude ratio sensitivity is much improved, by decreasing the pump strength. The experiments show that the amplitude ratio sensitivity of the proposed accelerometer is 9.2/g, and it can be enlarged to as high as 6300/g by employing a parametric pump signal with 100 mV strength, indicating a scale-factor improvement factor of 684. Consequently, the input-referred bias instability is improved from 6.7 g for the case of no parametric pump to 420 ng while employing a parametric pump for operation in the modal-overlap regime, showing an improvement by a factor of 16.

KW - Accelerometer

KW - Modal overlap

KW - Mode localization

KW - Parametric Pump

KW - Weak coupling

UR - http://www.scopus.com/inward/record.url?scp=85114965146&partnerID=8YFLogxK

U2 - 10.1109/Transducers50396.2021.9495639

DO - 10.1109/Transducers50396.2021.9495639

M3 - Conference contribution

AN - SCOPUS:85114965146

T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

SP - 108

EP - 111

BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

PB - IEEE

T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Y2 - 20 June 2021 through 25 June 2021

ER -