A Nail-Size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit

TY - JOUR

T1 - A Nail-Size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit

AU - Du, Sijun

AU - Jia, Yu

AU - Zhao, Chun

AU - Amaratunga, Gehan A.J.

AU - Seshia, Ashwin A.

N1 - Funding Information: Manuscript received July 22, 2019; revised August 30, 2019; accepted August 31, 2019. Date of publication September 12, 2019; date of current version December 20, 2019. This work was supported in part by the Innovate UK under Grant 102152 and in part by the UK Engineering and Physical Sciences Research Council under Grant EP/N021614/1. The associate editor coordinating the review of this article and approving it for publication was Dr. Yongjia Li. (Corresponding author: Ashwin A. Seshia.) S. Du is with the Department of Engineering, University of Cambridge, Cambridge CB2 1PZ, U.K., and also with the Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA 94720 USA (e-mail: [email protected]; [email protected]). Publisher Copyright: © 2001-2012 IEEE.

PY - 2019/9/12

Y1 - 2019/9/12

N2 - Piezoelectric vibration energy harvesting has drawn much interest to power distributed wireless sensor nodes for Internet of Things (IoT) applications where ambient kinetic energy is available. For certain applications, the harvesting system should be small and able to generate sufficient output power. Standard rectification topologies such as the full-bridge rectifier are typically inefficient when adapted to power conditioning from miniaturized harvesters. Therefore, active rectification circuits have been researched to improve overall power conversion efficiency, and meet both the output power and miniaturization requirements while employing a MEMS harvester. In this paper, a MEMS piezoelectric energy harvester is designed and co-integrated with an active synchronized switch harvesting on inductor (SSHI) rectification circuit designed in a CMOS process to achieve high output power for system miniaturization. The system is fully integrated on a nail-size board, which is ready to provide a stable DC power for low-power mini sensors. A MEMS energy harvester of 0.005 cm3 size, co-integrated with the CMOS conditioning circuit, outputs a peak rectified DC power of 40.6 \mu \text{W} and achieves a record DC power density of 8.12 mW/cm3 when compared to state-of-the-art harvesters.

AB - Piezoelectric vibration energy harvesting has drawn much interest to power distributed wireless sensor nodes for Internet of Things (IoT) applications where ambient kinetic energy is available. For certain applications, the harvesting system should be small and able to generate sufficient output power. Standard rectification topologies such as the full-bridge rectifier are typically inefficient when adapted to power conditioning from miniaturized harvesters. Therefore, active rectification circuits have been researched to improve overall power conversion efficiency, and meet both the output power and miniaturization requirements while employing a MEMS harvester. In this paper, a MEMS piezoelectric energy harvester is designed and co-integrated with an active synchronized switch harvesting on inductor (SSHI) rectification circuit designed in a CMOS process to achieve high output power for system miniaturization. The system is fully integrated on a nail-size board, which is ready to provide a stable DC power for low-power mini sensors. A MEMS energy harvester of 0.005 cm3 size, co-integrated with the CMOS conditioning circuit, outputs a peak rectified DC power of 40.6 \mu \text{W} and achieves a record DC power density of 8.12 mW/cm3 when compared to state-of-the-art harvesters.

KW - energy conversion

KW - Energy harvesting

KW - integrated circuits

KW - Internet of Things (IoT)

KW - MEMS

KW - piezoelectric transducer

KW - power conditioning

KW - rectification

KW - renewable energy

KW - SSHI

KW - system miniaturization

KW - wireless sensor networks (WSN)

UR - http://www.scopus.com/inward/record.url?scp=85077818203&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2019.2941180

DO - 10.1109/JSEN.2019.2941180

M3 - Article

AN - SCOPUS:85077818203

SN - 1530-437X

VL - 20

SP - 277

EP - 285

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 1

M1 - 8835123

ER -