A new characterization approach to study the mechanical behavior of silicon nanowires

Sina Zare Pakzad; Mohammad Nasr Esfahani; Zuhal Tasdemir; Nicole Wollschlaeger; Xue Fei Li; Taotao Li; Mustafa Yilmaz; Yusuf Leblebici; B. Erdem Alaca

doi:10.1557/s43580-021-00117-x

A new characterization approach to study the mechanical behavior of silicon nanowires

Sina Zare Pakzad, Mohammad Nasr Esfahani, Zuhal Tasdemir, Nicole Wollschlaeger, Xue Fei Li, Taotao Li, Mustafa Yilmaz, Yusuf Leblebici, B. Erdem Alaca^*

^*Corresponding author for this work

Electronic Engineering

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Abstract

This work proposes a new approach to characterize the mechanical properties of nanowires based on a combination of nanomechanical measurements and models. Silicon nanowires with a critical dimension of 90 nm and a length of 8 μm obtained through a monolithic process are characterized through in-situ three-point bending tests. A nonlinear nanomechanical model is developed to evaluate the mechanical behavior of nanowires. In this model, the intrinsic stress and surface parameters are examined based on Raman spectroscopy measurements and molecular dynamics simulations, respectively. This work demonstrates a new approach to measure the mechanical properties of Si nanowires by considering the surface effect and intrinsic stresses. The presented technique can be used to address the existing discrepancies between numerical estimations and experimental measurements on the modulus of elasticity of silicon nanowires. Graphic abstract: [Figure not available: see fulltext.]

Original language	English
Pages (from-to)	500-505
Number of pages	6
Journal	MRS Advances
Volume	6
Issue number	19
DOIs	https://doi.org/10.1557/s43580-021-00117-x
Publication status	Published - 3 Aug 2021

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© 2021, The Author(s), under exclusive licence to The Materials Research Society.

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@article{3d92ecff8706457db40c45ca476b6332,

title = "A new characterization approach to study the mechanical behavior of silicon nanowires",

abstract = "This work proposes a new approach to characterize the mechanical properties of nanowires based on a combination of nanomechanical measurements and models. Silicon nanowires with a critical dimension of 90 nm and a length of 8 μm obtained through a monolithic process are characterized through in-situ three-point bending tests. A nonlinear nanomechanical model is developed to evaluate the mechanical behavior of nanowires. In this model, the intrinsic stress and surface parameters are examined based on Raman spectroscopy measurements and molecular dynamics simulations, respectively. This work demonstrates a new approach to measure the mechanical properties of Si nanowires by considering the surface effect and intrinsic stresses. The presented technique can be used to address the existing discrepancies between numerical estimations and experimental measurements on the modulus of elasticity of silicon nanowires. Graphic abstract: [Figure not available: see fulltext.]",

author = "{Zare Pakzad}, Sina and {Nasr Esfahani}, Mohammad and Zuhal Tasdemir and Nicole Wollschlaeger and Li, {Xue Fei} and Taotao Li and Mustafa Yilmaz and Yusuf Leblebici and Alaca, {B. Erdem}",

note = "Publisher Copyright: {\textcopyright} 2021, The Author(s), under exclusive licence to The Materials Research Society.",

year = "2021",

month = aug,

day = "3",

doi = "10.1557/s43580-021-00117-x",

language = "English",

volume = "6",

pages = "500--505",

journal = "MRS Advances",

issn = "2059-8521",

publisher = "Springer",

number = "19",

}

TY - JOUR

T1 - A new characterization approach to study the mechanical behavior of silicon nanowires

AU - Zare Pakzad, Sina

AU - Nasr Esfahani, Mohammad

AU - Tasdemir, Zuhal

AU - Wollschlaeger, Nicole

AU - Li, Xue Fei

AU - Li, Taotao

AU - Yilmaz, Mustafa

AU - Leblebici, Yusuf

AU - Alaca, B. Erdem

PY - 2021/8/3

Y1 - 2021/8/3

N2 - This work proposes a new approach to characterize the mechanical properties of nanowires based on a combination of nanomechanical measurements and models. Silicon nanowires with a critical dimension of 90 nm and a length of 8 μm obtained through a monolithic process are characterized through in-situ three-point bending tests. A nonlinear nanomechanical model is developed to evaluate the mechanical behavior of nanowires. In this model, the intrinsic stress and surface parameters are examined based on Raman spectroscopy measurements and molecular dynamics simulations, respectively. This work demonstrates a new approach to measure the mechanical properties of Si nanowires by considering the surface effect and intrinsic stresses. The presented technique can be used to address the existing discrepancies between numerical estimations and experimental measurements on the modulus of elasticity of silicon nanowires. Graphic abstract: [Figure not available: see fulltext.]

AB - This work proposes a new approach to characterize the mechanical properties of nanowires based on a combination of nanomechanical measurements and models. Silicon nanowires with a critical dimension of 90 nm and a length of 8 μm obtained through a monolithic process are characterized through in-situ three-point bending tests. A nonlinear nanomechanical model is developed to evaluate the mechanical behavior of nanowires. In this model, the intrinsic stress and surface parameters are examined based on Raman spectroscopy measurements and molecular dynamics simulations, respectively. This work demonstrates a new approach to measure the mechanical properties of Si nanowires by considering the surface effect and intrinsic stresses. The presented technique can be used to address the existing discrepancies between numerical estimations and experimental measurements on the modulus of elasticity of silicon nanowires. Graphic abstract: [Figure not available: see fulltext.]

UR - http://www.scopus.com/inward/record.url?scp=85111835107&partnerID=8YFLogxK

U2 - 10.1557/s43580-021-00117-x

DO - 10.1557/s43580-021-00117-x

M3 - Article

AN - SCOPUS:85111835107

SN - 2059-8521

VL - 6

SP - 500

EP - 505

JO - MRS Advances

JF - MRS Advances

IS - 19

ER -

A new characterization approach to study the mechanical behavior of silicon nanowires

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