Abstract
In this work, a new scheme to enhance or decrease the sensitivity of a MEMS resonator is proposed. The proposed approach utilizes a periodic modulation on the stiffness of a standard clamped-clamped (C-C) beam, i.e. parametric modulation, to couple two intrinsic fundamental modes of vibration. Through this coupling, it is possible to transfer the sensitivity of one fundamental mode to the other, thereby creating regions where the sensitivity of the MEMS resonator can be enhanced or reduced. Finally, the effect of this approach on the noise performance is also investigated. And it is found that this approach does not deteriorate the noise performance. Potentially, this approach can be extended to other resonator structures, and could be applied to resonant MEMS sensors or timing references.
| Original language | English |
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| Title of host publication | 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 |
| Publisher | IEEE |
| Pages | 286-289 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781665419123 |
| DOIs | |
| Publication status | Published - 15 Mar 2021 |
| Event | 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States Duration: 25 Jan 2021 → 29 Jan 2021 |
Publication series
| Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
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| Volume | 2021-January |
| ISSN (Print) | 1084-6999 |
Conference
| Conference | 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 |
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| Country/Territory | United States |
| City | Virtual, Gainesville |
| Period | 25/01/21 → 29/01/21 |
Bibliographical note
Funding Information:This work was supported by the National Key Research and Development Program of China, Grant No. 2018YFB2002300.
Publisher Copyright:
© 2021 IEEE.
Keywords
- Dynamic modulation
- Modal frequency difference
- Parametric pump