A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor

Yuan Wang; Chen Wang; Chun Zhao; Huafeng Liu; Delphine Cerica; Mathieu Baijot; Francois Dupont; Serguei Stoukatch; Michael Kraft

doi:10.1109/TRANSDUCERS.2019.8808225

A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor

Yuan Wang, Chen Wang, Chun Zhao, Huafeng Liu, Delphine Cerica, Mathieu Baijot, Francois Dupont, Serguei Stoukatch, Michael Kraft

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports on a QCM (quartz crystal microbalance) mass sensor under atmospheric pressure that is combined with a 3-DOF micromachined coupled resonator operating in vacuum. With nanoparticles consecutively added on the QCM, the output signals from the QCM is then modified to produce electrostatic forces which are fed to a 3-DOF mode localized weakly coupled resonator. The 3-DOF coupled resonator hence utilizes the input electrostatic force as stiffness perturbations to perform the sensing operation. A comparison of three sensitivity characterization methods was carried out: resonance frequency shift, amplitude change and resonance vibration amplitude ratio. The results demonstrate that a 3-DOF mode localized coupled resonator incorporated with a QCM mass sensor has potential to be employed as a direct liquid contact biochemical transducer.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	IEEE
Pages	1823-1826
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808225
Publication status	Published - 22 Aug 2019
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

Keywords

3-DOF weakly coupled resonator
Mass sensing
MEMS resonant sensors
Mode localization
QCM

Access to Document

10.1109/TRANSDUCERS.2019.8808225

Cite this

Wang, Y., Wang, C., Zhao, C., Liu, H., Cerica, D., Baijot, M., Dupont, F., Stoukatch, S., & Kraft, M. (2019). A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1823-1826). Article 8808225 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808225

Wang, Yuan ; Wang, Chen ; Zhao, Chun et al. / A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. pp. 1823-1826 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{0c8cc1bd46e34c8782697937a4c4ccea,

title = "A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor",

abstract = "This paper reports on a QCM (quartz crystal microbalance) mass sensor under atmospheric pressure that is combined with a 3-DOF micromachined coupled resonator operating in vacuum. With nanoparticles consecutively added on the QCM, the output signals from the QCM is then modified to produce electrostatic forces which are fed to a 3-DOF mode localized weakly coupled resonator. The 3-DOF coupled resonator hence utilizes the input electrostatic force as stiffness perturbations to perform the sensing operation. A comparison of three sensitivity characterization methods was carried out: resonance frequency shift, amplitude change and resonance vibration amplitude ratio. The results demonstrate that a 3-DOF mode localized coupled resonator incorporated with a QCM mass sensor has potential to be employed as a direct liquid contact biochemical transducer.",

keywords = "3-DOF weakly coupled resonator, Mass sensing, MEMS resonant sensors, Mode localization, QCM",

author = "Yuan Wang and Chen Wang and Chun Zhao and Huafeng Liu and Delphine Cerica and Mathieu Baijot and Francois Dupont and Serguei Stoukatch and Michael Kraft",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

year = "2019",

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doi = "10.1109/TRANSDUCERS.2019.8808225",

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series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

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Wang, Y, Wang, C, Zhao, C, Liu, H, Cerica, D, Baijot, M, Dupont, F, Stoukatch, S & Kraft, M 2019, A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808225, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, IEEE, pp. 1823-1826, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808225

A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor. / Wang, Yuan; Wang, Chen; Zhao, Chun et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. p. 1823-1826 8808225 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor

AU - Wang, Yuan

AU - Wang, Chen

AU - Zhao, Chun

AU - Liu, Huafeng

AU - Cerica, Delphine

AU - Baijot, Mathieu

AU - Dupont, Francois

AU - Stoukatch, Serguei

AU - Kraft, Michael

PY - 2019/8/22

Y1 - 2019/8/22

N2 - This paper reports on a QCM (quartz crystal microbalance) mass sensor under atmospheric pressure that is combined with a 3-DOF micromachined coupled resonator operating in vacuum. With nanoparticles consecutively added on the QCM, the output signals from the QCM is then modified to produce electrostatic forces which are fed to a 3-DOF mode localized weakly coupled resonator. The 3-DOF coupled resonator hence utilizes the input electrostatic force as stiffness perturbations to perform the sensing operation. A comparison of three sensitivity characterization methods was carried out: resonance frequency shift, amplitude change and resonance vibration amplitude ratio. The results demonstrate that a 3-DOF mode localized coupled resonator incorporated with a QCM mass sensor has potential to be employed as a direct liquid contact biochemical transducer.

AB - This paper reports on a QCM (quartz crystal microbalance) mass sensor under atmospheric pressure that is combined with a 3-DOF micromachined coupled resonator operating in vacuum. With nanoparticles consecutively added on the QCM, the output signals from the QCM is then modified to produce electrostatic forces which are fed to a 3-DOF mode localized weakly coupled resonator. The 3-DOF coupled resonator hence utilizes the input electrostatic force as stiffness perturbations to perform the sensing operation. A comparison of three sensitivity characterization methods was carried out: resonance frequency shift, amplitude change and resonance vibration amplitude ratio. The results demonstrate that a 3-DOF mode localized coupled resonator incorporated with a QCM mass sensor has potential to be employed as a direct liquid contact biochemical transducer.

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KW - Mass sensing

KW - MEMS resonant sensors

KW - Mode localization

KW - QCM

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DO - 10.1109/TRANSDUCERS.2019.8808225

M3 - Conference contribution

AN - SCOPUS:85071925763

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

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BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - IEEE

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Wang Y, Wang C, Zhao C, Liu H, Cerica D, Baijot M et al. A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE. 2019. p. 1823-1826. 8808225. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808225

A Novel Qcm Mass Sensing System Incorporated with A 3-Dof Mode Localized Coupled Resonator Stiffness Sensor

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

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