A Resonant Lorentz-Force Magnetometer Based on Cavity Slotted Double-Ended Tuning Fork to Enhance Q-Factor and Sensitivity

TY - GEN

T1 - A Resonant Lorentz-Force Magnetometer Based on Cavity Slotted Double-Ended Tuning Fork to Enhance Q-Factor and Sensitivity

AU - Song, Xiaoxiao

AU - Wang, Chen

AU - Li, Chengxin

AU - Li, Fangzheng

AU - Xi, Jingqian

AU - Wang, Yuan

AU - Liu, Huafeng

AU - Zhao, Chun

AU - Tu, Liang Cheng

AU - Kraft, Michael

N1 - Publisher Copyright: © 2021 IEEE.

PY - 2021/8/6

Y1 - 2021/8/6

N2 - MEMS magnetometers have been applied in numerous fields, such as navigation, biomedical, geological exploration and aerospace. This work reports a resonant Lorentz-force magnetometer with a quality factor of 43000 in vacuum and a sensitivity of 3.3 Hz/nN under a 2 mT bias magnetic field. A differential pair of two magnetometers based on double-ended tuning fork (DETF) resonator is implemented to enhance the system signal to noise ratio (SNR). The topology of the DETF with cavity slots can improve the quality factor (Q-factor) effectively, resulting in an enhancement of 5.9-fold compared to a DETF resonator without slots. Theoretical computations are in good agreement with the simulation model and the actual experimental measurements confirm the feasibility of the proposed magnetometer. Future effort of this work will constitute an important step towards a magnetometer that can measure small variations of the magnetic field in tens of T range with a resolution of \nTsurd\Hz level, even under a strong bias magnetic field.

AB - MEMS magnetometers have been applied in numerous fields, such as navigation, biomedical, geological exploration and aerospace. This work reports a resonant Lorentz-force magnetometer with a quality factor of 43000 in vacuum and a sensitivity of 3.3 Hz/nN under a 2 mT bias magnetic field. A differential pair of two magnetometers based on double-ended tuning fork (DETF) resonator is implemented to enhance the system signal to noise ratio (SNR). The topology of the DETF with cavity slots can improve the quality factor (Q-factor) effectively, resulting in an enhancement of 5.9-fold compared to a DETF resonator without slots. Theoretical computations are in good agreement with the simulation model and the actual experimental measurements confirm the feasibility of the proposed magnetometer. Future effort of this work will constitute an important step towards a magnetometer that can measure small variations of the magnetic field in tens of T range with a resolution of \nTsurd\Hz level, even under a strong bias magnetic field.

KW - double-ended tuning fork

KW - Lorentz-force

KW - Magnetometer

KW - resonator

UR - http://www.scopus.com/inward/record.url?scp=85114963769&partnerID=8YFLogxK

U2 - 10.1109/Transducers50396.2021.9495528

DO - 10.1109/Transducers50396.2021.9495528

M3 - Conference contribution

AN - SCOPUS:85114963769

T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

SP - 410

EP - 413

BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

PB - IEEE

T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Y2 - 20 June 2021 through 25 June 2021

ER -