A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution

Yuan Wang; Xiaoxiao Song; Jingqian Xi; Fangzheng Li; Lei Xu; Huafeng Liu; Chen  Wang; Shuangyang Kuang; Liangcheng Tu; Michael Kraft; Chun Zhao

A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution

Yuan Wang, Xiaoxiao Song, Jingqian Xi, Fangzheng Li, Lei Xu, Huafeng Liu, Chen Wang, Shuangyang Kuang, Liangcheng Tu, Michael Kraft, Chun Zhao

Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 μV/ √ Hz, and a resolution of 0.23 pN/ √ Hz. In comparison with a conventional drive scheme, the blue- sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications.

Original language	English
Journal	Journal of Microelectromechanical Systems
Publication status	Published - 31 Mar 2022

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Cite this

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title = "A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution",

abstract = "This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 μV/ √ Hz, and a resolution of 0.23 pN/ √ Hz. In comparison with a conventional drive scheme, the blue- sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications.",

author = "Yuan Wang and Xiaoxiao Song and Jingqian Xi and Fangzheng Li and Lei Xu and Huafeng Liu and Chen Wang and Shuangyang Kuang and Liangcheng Tu and Michael Kraft and Chun Zhao",

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language = "English",

journal = "Journal of Microelectromechanical Systems",

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T1 - A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution

AU - Wang, Yuan

AU - Song, Xiaoxiao

AU - Xi, Jingqian

AU - Li, Fangzheng

AU - Xu, Lei

AU - Liu, Huafeng

AU - Wang, Chen

AU - Kuang, Shuangyang

AU - Tu, Liangcheng

AU - Kraft, Michael

AU - Zhao, Chun

PY - 2022/3/31

Y1 - 2022/3/31

N2 - This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 μV/ √ Hz, and a resolution of 0.23 pN/ √ Hz. In comparison with a conventional drive scheme, the blue- sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications.

AB - This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 μV/ √ Hz, and a resolution of 0.23 pN/ √ Hz. In comparison with a conventional drive scheme, the blue- sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications.

M3 - Article

SN - 1057-7157

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

ER -