A resonant MEMS accelerometer with 56ng bias stability and 98ng/Hz1/2 noise floor

Chun Zhao; Milind Pandit; Guillermo Sobreviela; Philipp Steinmann; Arif Mustafazade; Xudong Zou; Ashwin Seshia

doi:10.1109/JMEMS.2019.2908931

A resonant MEMS accelerometer with 56ng bias stability and 98ng/Hz^1/2 noise floor

Chun Zhao^*, Milind Pandit, Guillermo Sobreviela, Philipp Steinmann, Arif Mustafazade, Xudong Zou, Ashwin Seshia

^*Corresponding author for this work

Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This letter presents a high-performance resonant MEMS accelerometer comprising of a single force-sensitive vibrating beam element sandwiched between two inertial masses. The accelerometer demonstrates a noise floor of 98 ng/Hz^1/2 and a bias stability of 56 ng under ambient conditions, corresponding to a frequency noise floor of 0.77 ppb/Hz^1/2 and a frequency bias stability of 0.43 ppb. These are the best results achieved for a MEMS accelerometer employing the resonant sensing paradigm to-date.

Original language	English
Article number	8692386
Pages (from-to)	324-326
Number of pages	3
Journal	Journal of Microelectromechanical Systems
Volume	28
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2019.2908931
Publication status	Published - Jun 2019

Bibliographical note

Funding Information:
Manuscript received October 26, 2018; revised January 27, 2019; accepted March 30, 2019. Date of publication April 16, 2019; date of current version May 31, 2019. This work was supported in part by Innovate U.K. and in part by the Natural Environment Research Council, U.K. Subject Editor A. M. Shkel. (Corresponding author: Chun Zhao.) C. Zhao, M. Pandit, G. Sobreviela, and A. Seshia are with The Nanoscience Centre, University of Cambridge, Cambridge CB3 0FF, U.K. (e-mail: [email protected]).

Publisher Copyright:
© 2019 IEEE.

Keywords

Bias stability
MEMS resonant accelerometer
Noise floor

Access to Document

10.1109/JMEMS.2019.2908931

Cite this

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title = "A resonant MEMS accelerometer with 56ng bias stability and 98ng/Hz1/2 noise floor",

abstract = "This letter presents a high-performance resonant MEMS accelerometer comprising of a single force-sensitive vibrating beam element sandwiched between two inertial masses. The accelerometer demonstrates a noise floor of 98 ng/Hz1/2 and a bias stability of 56 ng under ambient conditions, corresponding to a frequency noise floor of 0.77 ppb/Hz1/2 and a frequency bias stability of 0.43 ppb. These are the best results achieved for a MEMS accelerometer employing the resonant sensing paradigm to-date.",

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note = "Funding Information: Manuscript received October 26, 2018; revised January 27, 2019; accepted March 30, 2019. Date of publication April 16, 2019; date of current version May 31, 2019. This work was supported in part by Innovate U.K. and in part by the Natural Environment Research Council, U.K. Subject Editor A. M. Shkel. (Corresponding author: Chun Zhao.) C. Zhao, M. Pandit, G. Sobreviela, and A. Seshia are with The Nanoscience Centre, University of Cambridge, Cambridge CB3 0FF, U.K. (e-mail: [email protected]). Publisher Copyright: {\textcopyright} 2019 IEEE.",

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AU - Steinmann, Philipp

AU - Mustafazade, Arif

AU - Zou, Xudong

AU - Seshia, Ashwin

N1 - Funding Information: Manuscript received October 26, 2018; revised January 27, 2019; accepted March 30, 2019. Date of publication April 16, 2019; date of current version May 31, 2019. This work was supported in part by Innovate U.K. and in part by the Natural Environment Research Council, U.K. Subject Editor A. M. Shkel. (Corresponding author: Chun Zhao.) C. Zhao, M. Pandit, G. Sobreviela, and A. Seshia are with The Nanoscience Centre, University of Cambridge, Cambridge CB3 0FF, U.K. (e-mail: [email protected]). Publisher Copyright: © 2019 IEEE.

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