A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity

Chun Zhao, Graham S. Wood, Jianbing Xie, Honglong Chang, Suan Hui Pu, Harold M.H. Chong, Michael Kraft

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator, mode localization occurs, leading to a drastic change of mode shape, which can be detected by measuring the modal amplitude ratio change. A 49 times improvement in sensitivity compared to a previously reported 2DoF resonator sensor, and 4 orders of magnitude enhancement compared to a 1DoF resonator sensor has been achieved.

Original languageEnglish
Title of host publication2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PublisherIEEE
Pages881-884
Number of pages4
EditionFebruary
ISBN (Electronic)9781479979554
DOIs
Publication statusPublished - 26 Feb 2015
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 18 Jan 201522 Jan 2015

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
NumberFebruary
Volume2015-February
ISSN (Print)1084-6999

Conference

Conference2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/TerritoryPortugal
CityEstoril
Period18/01/1522/01/15

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