@inproceedings{76f6c118949e4ce7bf4afb16e738046c,
title = "A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity",
abstract = "This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator, mode localization occurs, leading to a drastic change of mode shape, which can be detected by measuring the modal amplitude ratio change. A 49 times improvement in sensitivity compared to a previously reported 2DoF resonator sensor, and 4 orders of magnitude enhancement compared to a 1DoF resonator sensor has been achieved.",
author = "Chun Zhao and Wood, {Graham S.} and Jianbing Xie and Honglong Chang and Pu, {Suan Hui} and Chong, {Harold M.H.} and Michael Kraft",
year = "2015",
month = feb,
day = "26",
doi = "10.1109/MEMSYS.2015.7051100",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "IEEE",
number = "February",
pages = "881--884",
booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015",
address = "United States",
edition = "February",
note = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",
}