Abstract
We report on the development of a small size (9 cm in length and 4.5 in diameter) all electrostatic field emission column for use in surface analysis and very low energy studies. The column focuses a beam of electrons over the energy range 1-10,000 eV through the use of the cathode lens mode. The cathode lens mode employs an in-lens electron detector, which is placed between the gun lens and the objective lens. An electron beam diameter of 80 nin and beam current of order 10(-9)A are predicted for a working distance of 5 nun and electron beam energy of 5 keV. When the column is operated in the cathode lens mode, an electron beam diameter <250 nm at 10 eV is expected.
| Original language | English |
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| Title of host publication | ELECTRON MICROSCOPY AND ANALYSIS 2001 |
| Editors | M Aindow, CJ Kiely |
| Place of Publication | BRISTOL |
| Publisher | IOP Publishing |
| Pages | 111-114 |
| Number of pages | 4 |
| ISBN (Print) | 0-7503-0812-5 |
| Publication status | Published - 2001 |
| Event | Conference of the Electron-Microscopy-and Analysis-Group - DUNDEE Duration: 5 Sept 2001 → 7 Sept 2001 |
Conference
| Conference | Conference of the Electron-Microscopy-and Analysis-Group |
|---|---|
| City | DUNDEE |
| Period | 5/09/01 → 7/09/01 |