Absolute atomic oxygen density distributions in the effluent of a microscale atmospheric pressure plasma jet

N. Knake; S. Reuter; K. Niemi; V. Schulz-von der Gathen; J. Winter

doi:10.1088/0022-3727/41/19/194006

Absolute atomic oxygen density distributions in the effluent of a microscale atmospheric pressure plasma jet

N. Knake, S. Reuter, K. Niemi, V. Schulz-von der Gathen, J. Winter

Physics

Research output: Contribution to journal › Article › peer-review

Abstract

The coplanar microscale atmospheric pressure plasma jet (mu-APPJ) is a capacitively coupled radio frequency discharge (13.56 MHz, similar to 15W rf power) designed for optimized optical diagnostic access. It is operated in a homogeneous glow mode with a noble gas flow (1.4 slm He) containing a small admixture of molecular oxygen (similar to 0.5%). Ground state atomic oxygen densities in the effluent up to 2 x 10(14) cm(-3) are measured by two-photon absorption laser-induced fluorescence spectroscopy (TALIF) providing space resolved density maps. The quantitative calibration of the TALIF setup is performed by comparative measurements with xenon. A maximum of the atomic oxygen density is observed for 0.6% molecular oxygen admixture. Furthermore, an increase in the rf power up to about 15W (depending on gas flow and mixture) leads to an increase in the effluent's atomic oxygen density, then reaching a constant level for higher powers.

Original language	English
Article number	194006
Pages (from-to)	-
Number of pages	6
Journal	Journal of Physics D: Applied Physics
Volume	41
Issue number	19
DOIs	https://doi.org/10.1088/0022-3727/41/19/194006
Publication status	Published - 7 Oct 2008

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abstract = "The coplanar microscale atmospheric pressure plasma jet (mu-APPJ) is a capacitively coupled radio frequency discharge (13.56 MHz, similar to 15W rf power) designed for optimized optical diagnostic access. It is operated in a homogeneous glow mode with a noble gas flow (1.4 slm He) containing a small admixture of molecular oxygen (similar to 0.5%). Ground state atomic oxygen densities in the effluent up to 2 x 10(14) cm(-3) are measured by two-photon absorption laser-induced fluorescence spectroscopy (TALIF) providing space resolved density maps. The quantitative calibration of the TALIF setup is performed by comparative measurements with xenon. A maximum of the atomic oxygen density is observed for 0.6% molecular oxygen admixture. Furthermore, an increase in the rf power up to about 15W (depending on gas flow and mixture) leads to an increase in the effluent's atomic oxygen density, then reaching a constant level for higher powers.",

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AU - Knake, N.

AU - Reuter, S.

AU - Niemi, K.

AU - Schulz-von der Gathen, V.

AU - Winter, J.

PY - 2008/10/7

Y1 - 2008/10/7

N2 - The coplanar microscale atmospheric pressure plasma jet (mu-APPJ) is a capacitively coupled radio frequency discharge (13.56 MHz, similar to 15W rf power) designed for optimized optical diagnostic access. It is operated in a homogeneous glow mode with a noble gas flow (1.4 slm He) containing a small admixture of molecular oxygen (similar to 0.5%). Ground state atomic oxygen densities in the effluent up to 2 x 10(14) cm(-3) are measured by two-photon absorption laser-induced fluorescence spectroscopy (TALIF) providing space resolved density maps. The quantitative calibration of the TALIF setup is performed by comparative measurements with xenon. A maximum of the atomic oxygen density is observed for 0.6% molecular oxygen admixture. Furthermore, an increase in the rf power up to about 15W (depending on gas flow and mixture) leads to an increase in the effluent's atomic oxygen density, then reaching a constant level for higher powers.

AB - The coplanar microscale atmospheric pressure plasma jet (mu-APPJ) is a capacitively coupled radio frequency discharge (13.56 MHz, similar to 15W rf power) designed for optimized optical diagnostic access. It is operated in a homogeneous glow mode with a noble gas flow (1.4 slm He) containing a small admixture of molecular oxygen (similar to 0.5%). Ground state atomic oxygen densities in the effluent up to 2 x 10(14) cm(-3) are measured by two-photon absorption laser-induced fluorescence spectroscopy (TALIF) providing space resolved density maps. The quantitative calibration of the TALIF setup is performed by comparative measurements with xenon. A maximum of the atomic oxygen density is observed for 0.6% molecular oxygen admixture. Furthermore, an increase in the rf power up to about 15W (depending on gas flow and mixture) leads to an increase in the effluent's atomic oxygen density, then reaching a constant level for higher powers.

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Absolute atomic oxygen density distributions in the effluent of a microscale atmospheric pressure plasma jet

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