Absolute atomic oxygen density measurements by two-photon absorption laser-induced fluorescence spectroscopy in an RF-excited atmospheric pressure plasma jet

K Niemi, V Schulz-von der Gathen, H F Dobele

Research output: Contribution to journalArticlepeer-review

Abstract

The atmospheric pressure plasma jet is a capacitively coupled radio frequency discharge (13.56 MHz) running with a high helium flux (2 m(3) h(-1)) between concentric electrodes. Small amounts (0.5%) of admixed molecular oxygen do not disturb the homogeneous plasma discharge. The jet effluent leaving the discharge through the ring-shaped nozzle contains high concentrations of radicals at a low gas temperature-the key property for a variety of applications aiming at treatment of thermally sensitive surfaces. We report on absolute atomic oxygen density measurements by two-photon absorption laser-induced fluorescence (TALIF) spectroscopy in the jet effluent. Calibration is performed with the aid of a comparative TALIF measurement with xenon. An excitation scheme (different from the one earlier published) providing spectral matching of both the two-photon resonances and the fluorescence transitions is applied.

Original languageEnglish
Pages (from-to)375-386
Number of pages12
JournalPlasma sources science & technology
Volume14
Issue number2
DOIs
Publication statusPublished - May 2005

Cite this