Abstract
An energy stabilizing system for electron energy loss spectrometers in a transmission electron microscope (TEM) is described. The key element is a wire sensor based fast electron detector that can sample the 'zero-loss' component of the transmitted electrons at a high refreshing rate. A digital based real-time processor is used to determine the relative shift in the zero-loss component beam and to produce a closed feedback loop to stabilize the energy dispersed electron distribution at the back focal plane of the post-column spectrometer. The system had the distinctive advantage of simultaneously acquiring a drift corrected electron energy loss spectrum over the energy range where the beam is sensed while stabilizing the whole energy loss distribution for more efficient acquisition by a separate (parallel) detector. A TEM version of the alignment figure is described to aid the alignment and operation of the system for an energy stabilized post-column spectrometer in a conventional transmission electron microscope. The effect of aberration on the accuracy of the energy stabilization is discussed. (C) 2008 Elsevier B. V. All rights reserved.
| Original language | English |
|---|---|
| Title of host publication | PROCEEDINGS OF THE SEVENTH INTERNATIONAL CONFERENCE ON CHARGED PARTICLE OPTICS (CPO-7) |
| Editors | E Munro, J Rouse |
| Place of Publication | AMSTERDAM |
| Publisher | Elsevier |
| Pages | 521-527 |
| Number of pages | 7 |
| DOIs | |
| Publication status | Published - 2008 |
Keywords
- Beam stabilizer
- Electron energy loss spectrometer
- Aberration figure
- LOSS SPECTROSCOPY