An integrated gold-film temperature sensor for in situ temperature measurement of a high-precision mems accelerometer

TY - JOUR

T1 - An integrated gold-film temperature sensor for in situ temperature measurement of a high-precision mems accelerometer

AU - Song, Xiaoxiao

AU - Liu, Huafeng

AU - Fang, Yanyan

AU - Zhao, Chun

AU - Qu, Ziqiang

AU - Wang, Qiu

AU - Tu, Liang Cheng

N1 - Funding Information: Funding: This work was supported in part by the Natural Science Foundation of Hubei Province under Grant 2019CFB108, in part by the Pre-Research Field Foundation of Equipment Development Department of China under Grant 61405170105, in part by the CAST-BISEE Innovation Funds under Grant CAST-BISEE2017-019. Publisher Copyright: © 2020 by the authors. Licensee MDPI, Basel, Switzerland.

PY - 2020/6/29

Y1 - 2020/6/29

N2 - Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physical quantities, it is often desirable to integrate temperature sensors with other physical sensors, including accelerometers. In this study, we introduce an integrated gold-film resistor-type temperature sensor for in situ temperature measurement of a high-precision MEMS accelerometer. Gold was chosen as the material of the temperature sensor, for both its great resistance to oxidation and its better compatibility with our in-house capacitive accelerometer micro-fabrication process. The proposed temperature sensor was first calibrated and then evaluated. Experimental results showed the temperature measurement accuracy to be 0.08 °C; the discrepancies among the sensors were within 0.02 °C; the repeatability within seven days was 0.03 °C; the noise floor was 1 mK/√[email protected] Hz and 100 μK/√[email protected] Hz. The integration test with a MEMS accelerometer showed that by subtracting the temperature effect, the bias stability within 46 h for the accelerometer could be improved from 2.15 μg to 640 ng. This demonstrates the capability of measuring temperature in situ with the potential to eliminate the temperature effects of the MEMS accelerometer through system-level compensation.

AB - Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physical quantities, it is often desirable to integrate temperature sensors with other physical sensors, including accelerometers. In this study, we introduce an integrated gold-film resistor-type temperature sensor for in situ temperature measurement of a high-precision MEMS accelerometer. Gold was chosen as the material of the temperature sensor, for both its great resistance to oxidation and its better compatibility with our in-house capacitive accelerometer micro-fabrication process. The proposed temperature sensor was first calibrated and then evaluated. Experimental results showed the temperature measurement accuracy to be 0.08 °C; the discrepancies among the sensors were within 0.02 °C; the repeatability within seven days was 0.03 °C; the noise floor was 1 mK/√[email protected] Hz and 100 μK/√[email protected] Hz. The integration test with a MEMS accelerometer showed that by subtracting the temperature effect, the bias stability within 46 h for the accelerometer could be improved from 2.15 μg to 640 ng. This demonstrates the capability of measuring temperature in situ with the potential to eliminate the temperature effects of the MEMS accelerometer through system-level compensation.

KW - High-precision MEMS accelerometer

KW - In situ temperature measurement

KW - Integrated

KW - Temperature sensor

UR - http://www.scopus.com/inward/record.url?scp=85087108673&partnerID=8YFLogxK

U2 - 10.3390/s20133652

DO - 10.3390/s20133652

M3 - Letter

C2 - 32610636

AN - SCOPUS:85087108673

SN - 1424-8220

VL - 20

SP - 1

EP - 13

JO - Sensors (Switzerland)

JF - Sensors (Switzerland)

IS - 13

M1 - 3652

ER -