An Ultra-High-Quality Factor Silicon Disk Resonator

Guillermo Sobreviela; Xudong Zou; Chun Zhao; Milind Pandit; Ashwin A. Seshia

doi:10.1109/TRANSDUCERS.2019.8808211

An Ultra-High-Quality Factor Silicon Disk Resonator

Guillermo Sobreviela, Xudong Zou, Chun Zhao, Milind Pandit, Ashwin A. Seshia

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A disk resonator demonstrates an ultra-high-quality factor (Q ∼ 10⁷) at room temperature. When embedded in a board-level feedback oscillator an excellent short-term stability (340 ppt @ 1s integration time) is measured. The use of a new higher-order bulk mode in the disk in combination with the anchor alignment with the nodal locations enables minimization of anchor losses, boosting the resonator quality factor.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	IEEE
Pages	527-530
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808211
Publication status	Published - 22 Aug 2019
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Bibliographical note

Funding Information:
This work was supported by funding from Innovate UK and the DASA.

Publisher Copyright:
© 2019 IEEE.

Keywords

Microelectromechanical resonators
oscillators
Quality factor
ring-down measurements

Access to Document

10.1109/TRANSDUCERS.2019.8808211

Cite this

Sobreviela, G., Zou, X., Zhao, C., Pandit, M., & Seshia, A. A. (2019). An Ultra-High-Quality Factor Silicon Disk Resonator. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 527-530). Article 8808211 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808211

Sobreviela, Guillermo ; Zou, Xudong ; Zhao, Chun et al. / An Ultra-High-Quality Factor Silicon Disk Resonator. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. pp. 527-530 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

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title = "An Ultra-High-Quality Factor Silicon Disk Resonator",

abstract = "A disk resonator demonstrates an ultra-high-quality factor (Q ∼ 107) at room temperature. When embedded in a board-level feedback oscillator an excellent short-term stability (340 ppt @ 1s integration time) is measured. The use of a new higher-order bulk mode in the disk in combination with the anchor alignment with the nodal locations enables minimization of anchor losses, boosting the resonator quality factor.",

keywords = "Microelectromechanical resonators, oscillators, Quality factor, ring-down measurements",

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Sobreviela, G, Zou, X, Zhao, C, Pandit, M & Seshia, AA 2019, An Ultra-High-Quality Factor Silicon Disk Resonator. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808211, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, IEEE, pp. 527-530, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808211

An Ultra-High-Quality Factor Silicon Disk Resonator. / Sobreviela, Guillermo; Zou, Xudong; Zhao, Chun et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. p. 527-530 8808211 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Sobreviela G, Zou X, Zhao C, Pandit M, Seshia AA. An Ultra-High-Quality Factor Silicon Disk Resonator. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE. 2019. p. 527-530. 8808211. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808211

An Ultra-High-Quality Factor Silicon Disk Resonator

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

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