An Ultra-High Resolution Resonant MEMS Accelerometer

Milind Pandit, Arif Mustafazade, Chun Zhao, Guillermo Sobreviela, Xudong Zou, Philipp Steinmann, Ashwin Seshia

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports initial results on the implementation of a high-resolution resonant MEMS accelerometer with a noise floor of 17.8\text{ng}/\surd{}\text{Hz} and a bias stability of 17.5ng with a differential frequency readout configuration. The differential readout scheme provides for rejection of common mode environmental effects to first order. This prototype sensor demonstrates the best bias stability and noise floor of all MEMS resonant accelerometer configurations reported till date.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherIEEE
Pages664-667
Number of pages4
ISBN (Electronic)9781728116105
DOIs
Publication statusPublished - Jan 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 27 Jan 201931 Jan 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/TerritoryKorea, Republic of
CitySeoul
Period27/01/1931/01/19

Bibliographical note

Funding Information:
This work is supported by funding from Innovate UK and Natural Environment Research Council.

Publisher Copyright:
© 2019 IEEE.

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