Abstract
This paper reports initial results on the implementation of a high-resolution resonant MEMS accelerometer with a noise floor of 17.8\text{ng}/\surd{}\text{Hz} and a bias stability of 17.5ng with a differential frequency readout configuration. The differential readout scheme provides for rejection of common mode environmental effects to first order. This prototype sensor demonstrates the best bias stability and noise floor of all MEMS resonant accelerometer configurations reported till date.
Original language | English |
---|---|
Title of host publication | 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 |
Publisher | IEEE |
Pages | 664-667 |
Number of pages | 4 |
ISBN (Electronic) | 9781728116105 |
DOIs | |
Publication status | Published - Jan 2019 |
Event | 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019 |
Publication series
Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
---|---|
Volume | 2019-January |
ISSN (Print) | 1084-6999 |
Conference
Conference | 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 |
---|---|
Country/Territory | Korea, Republic of |
City | Seoul |
Period | 27/01/19 → 31/01/19 |
Bibliographical note
Funding Information:This work is supported by funding from Innovate UK and Natural Environment Research Council.
Publisher Copyright:
© 2019 IEEE.