Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser

Ashish Suri; Andrew Pratt; Steve Tear; Chris Walker; Cem Kincal; Umut Kamber; Oghuzan Gurlu; Mohamed M El Gomati

doi:10.1016/j.elspec.2019.02.002

Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser

Ashish Suri, Andrew Pratt, Steve Tear, Chris Walker, Cem Kincal, Umut Kamber, Oghuzan Gurlu, Mohamed M El Gomati

Research output: Contribution to journal › Article › peer-review

Abstract

The interpretation of images generated by scanning electron microscopes (SEMs) requires quantifiable and well-understood contrast. Furthermore, recent interest in probing samples using low-energy electrons to extract surface information is pushing towards the quantification of relative contrast in secondary-electron (SE) images. The detection and analysis of low-energy SEs remains at the heart of the development of such instruments and techniques. However, state-of-the-art SE detectors in most SEMs, which are largely using in-lens configurations, are mainly designed to favour the collection of primary-induced SEs, and hence fail to provide electron energy information that could be related to the sample composition. Here, we report on the development of a novel SE detector which makes use of the Bessel box (BB) electron energy analyser. We demonstrate a very compact analyser design (˜a volume of 12 mm3) through simulations and by acquiring an electron spectrum from a sample of graphene on copper. A resolution of 0.3% has been numerically computed and experimentally verified for the BB analyser.

Original language	English
Article number	146823
Number of pages	8
Journal	JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume	241
Early online date	4 Feb 2019
DOIs	https://doi.org/10.1016/j.elspec.2019.02.002 https://doi.org/10.1016/j.elspec.2019.02.002
Publication status	Published - May 2020

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Suri, A., Pratt, A., Tear, S., Walker, C., Kincal, C., Kamber, U., Gurlu, O., & El Gomati, M. M. (2020). Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 241, Article 146823. https://doi.org/10.1016/j.elspec.2019.02.002, https://doi.org/10.1016/j.elspec.2019.02.002

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title = "Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser",

abstract = "The interpretation of images generated by scanning electron microscopes (SEMs) requires quantifiable and well-understood contrast. Furthermore, recent interest in probing samples using low-energy electrons to extract surface information is pushing towards the quantification of relative contrast in secondary-electron (SE) images. The detection and analysis of low-energy SEs remains at the heart of the development of such instruments and techniques. However, state-of-the-art SE detectors in most SEMs, which are largely using in-lens configurations, are mainly designed to favour the collection of primary-induced SEs, and hence fail to provide electron energy information that could be related to the sample composition. Here, we report on the development of a novel SE detector which makes use of the Bessel box (BB) electron energy analyser. We demonstrate a very compact analyser design (˜a volume of 12 mm3) through simulations and by acquiring an electron spectrum from a sample of graphene on copper. A resolution of 0.3% has been numerically computed and experimentally verified for the BB analyser.",

author = "Ashish Suri and Andrew Pratt and Steve Tear and Chris Walker and Cem Kincal and Umut Kamber and Oghuzan Gurlu and {El Gomati}, {Mohamed M}",

year = "2020",

month = may,

doi = "10.1016/j.elspec.2019.02.002",

language = "English",

volume = "241",

journal = "JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA",

issn = "0368-2048",

publisher = "Elsevier",

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Suri, A , Pratt, A , Tear, S, Walker, C, Kincal, C, Kamber, U, Gurlu, O & El Gomati, MM 2020, 'Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser', JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, vol. 241, 146823. https://doi.org/10.1016/j.elspec.2019.02.002, https://doi.org/10.1016/j.elspec.2019.02.002

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T1 - Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser

AU - Suri, Ashish

AU - Pratt, Andrew

AU - Tear, Steve

AU - Walker, Chris

AU - Kincal, Cem

AU - Kamber, Umut

AU - Gurlu, Oghuzan

AU - El Gomati, Mohamed M

PY - 2020/5

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N2 - The interpretation of images generated by scanning electron microscopes (SEMs) requires quantifiable and well-understood contrast. Furthermore, recent interest in probing samples using low-energy electrons to extract surface information is pushing towards the quantification of relative contrast in secondary-electron (SE) images. The detection and analysis of low-energy SEs remains at the heart of the development of such instruments and techniques. However, state-of-the-art SE detectors in most SEMs, which are largely using in-lens configurations, are mainly designed to favour the collection of primary-induced SEs, and hence fail to provide electron energy information that could be related to the sample composition. Here, we report on the development of a novel SE detector which makes use of the Bessel box (BB) electron energy analyser. We demonstrate a very compact analyser design (˜a volume of 12 mm3) through simulations and by acquiring an electron spectrum from a sample of graphene on copper. A resolution of 0.3% has been numerically computed and experimentally verified for the BB analyser.

AB - The interpretation of images generated by scanning electron microscopes (SEMs) requires quantifiable and well-understood contrast. Furthermore, recent interest in probing samples using low-energy electrons to extract surface information is pushing towards the quantification of relative contrast in secondary-electron (SE) images. The detection and analysis of low-energy SEs remains at the heart of the development of such instruments and techniques. However, state-of-the-art SE detectors in most SEMs, which are largely using in-lens configurations, are mainly designed to favour the collection of primary-induced SEs, and hence fail to provide electron energy information that could be related to the sample composition. Here, we report on the development of a novel SE detector which makes use of the Bessel box (BB) electron energy analyser. We demonstrate a very compact analyser design (˜a volume of 12 mm3) through simulations and by acquiring an electron spectrum from a sample of graphene on copper. A resolution of 0.3% has been numerically computed and experimentally verified for the BB analyser.

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DO - 10.1016/j.elspec.2019.02.002

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JO - JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA

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