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Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser

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Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser. / Suri, Ashish; Pratt, Andrew; Tear, Steve; Walker, Chris; Kincal, Cem; Kamber, Umut; Gurlu, Oghuzan; El Gomati, Mohamed M.

In: JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, Vol. 241, 146823, 05.2020.

Research output: Contribution to journalArticlepeer-review

Harvard

Suri, A, Pratt, A, Tear, S, Walker, C, Kincal, C, Kamber, U, Gurlu, O & El Gomati, MM 2020, 'Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser', JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, vol. 241, 146823. https://doi.org/10.1016/j.elspec.2019.02.002, https://doi.org/10.1016/j.elspec.2019.02.002

APA

Suri, A., Pratt, A., Tear, S., Walker, C., Kincal, C., Kamber, U., Gurlu, O., & El Gomati, M. M. (2020). Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 241, [146823]. https://doi.org/10.1016/j.elspec.2019.02.002, https://doi.org/10.1016/j.elspec.2019.02.002

Vancouver

Suri A, Pratt A, Tear S, Walker C, Kincal C, Kamber U et al. Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA. 2020 May;241. 146823. https://doi.org/10.1016/j.elspec.2019.02.002, https://doi.org/10.1016/j.elspec.2019.02.002

Author

Suri, Ashish ; Pratt, Andrew ; Tear, Steve ; Walker, Chris ; Kincal, Cem ; Kamber, Umut ; Gurlu, Oghuzan ; El Gomati, Mohamed M. / Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser. In: JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA. 2020 ; Vol. 241.

Bibtex - Download

@article{308cd4c9fab1436a83598b95de8f99c8,
title = "Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser",
abstract = "The interpretation of images generated by scanning electron microscopes (SEMs) requires quantifiable and well-understood contrast. Furthermore, recent interest in probing samples using low-energy electrons to extract surface information is pushing towards the quantification of relative contrast in secondary-electron (SE) images. The detection and analysis of low-energy SEs remains at the heart of the development of such instruments and techniques. However, state-of-the-art SE detectors in most SEMs, which are largely using in-lens configurations, are mainly designed to favour the collection of primary-induced SEs, and hence fail to provide electron energy information that could be related to the sample composition. Here, we report on the development of a novel SE detector which makes use of the Bessel box (BB) electron energy analyser. We demonstrate a very compact analyser design (˜a volume of 12 mm3) through simulations and by acquiring an electron spectrum from a sample of graphene on copper. A resolution of 0.3% has been numerically computed and experimentally verified for the BB analyser.",
author = "Ashish Suri and Andrew Pratt and Steve Tear and Chris Walker and Cem Kincal and Umut Kamber and Oghuzan Gurlu and {El Gomati}, {Mohamed M}",
year = "2020",
month = may,
doi = "10.1016/j.elspec.2019.02.002",
language = "English",
volume = "241",
journal = "JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA",
issn = "0368-2048",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser

AU - Suri, Ashish

AU - Pratt, Andrew

AU - Tear, Steve

AU - Walker, Chris

AU - Kincal, Cem

AU - Kamber, Umut

AU - Gurlu, Oghuzan

AU - El Gomati, Mohamed M

PY - 2020/5

Y1 - 2020/5

N2 - The interpretation of images generated by scanning electron microscopes (SEMs) requires quantifiable and well-understood contrast. Furthermore, recent interest in probing samples using low-energy electrons to extract surface information is pushing towards the quantification of relative contrast in secondary-electron (SE) images. The detection and analysis of low-energy SEs remains at the heart of the development of such instruments and techniques. However, state-of-the-art SE detectors in most SEMs, which are largely using in-lens configurations, are mainly designed to favour the collection of primary-induced SEs, and hence fail to provide electron energy information that could be related to the sample composition. Here, we report on the development of a novel SE detector which makes use of the Bessel box (BB) electron energy analyser. We demonstrate a very compact analyser design (˜a volume of 12 mm3) through simulations and by acquiring an electron spectrum from a sample of graphene on copper. A resolution of 0.3% has been numerically computed and experimentally verified for the BB analyser.

AB - The interpretation of images generated by scanning electron microscopes (SEMs) requires quantifiable and well-understood contrast. Furthermore, recent interest in probing samples using low-energy electrons to extract surface information is pushing towards the quantification of relative contrast in secondary-electron (SE) images. The detection and analysis of low-energy SEs remains at the heart of the development of such instruments and techniques. However, state-of-the-art SE detectors in most SEMs, which are largely using in-lens configurations, are mainly designed to favour the collection of primary-induced SEs, and hence fail to provide electron energy information that could be related to the sample composition. Here, we report on the development of a novel SE detector which makes use of the Bessel box (BB) electron energy analyser. We demonstrate a very compact analyser design (˜a volume of 12 mm3) through simulations and by acquiring an electron spectrum from a sample of graphene on copper. A resolution of 0.3% has been numerically computed and experimentally verified for the BB analyser.

U2 - 10.1016/j.elspec.2019.02.002

DO - 10.1016/j.elspec.2019.02.002

M3 - Article

VL - 241

JO - JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA

JF - JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA

SN - 0368-2048

M1 - 146823

ER -