Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O-2

Y. Hayashi; S. Hirao; Y. Zhang; T. Gans; D. O'Connell; Z. Lj Petrovic; T. Makabe

doi:10.1088/0022-3727/42/14/145206

Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O-2

Y. Hayashi, S. Hirao, Y. Zhang, T. Gans, D. O'Connell, Z. Lj Petrovic, T. Makabe

Physics

Research output: Contribution to journal › Article › peer-review

Abstract

We have measured the densities of 1s(5) and 1s(3) argon metastables as a function of the abundance of molecular oxygen in an inductively coupled plasma (ICP) in mixtures of Ar and O-2. Laser absorption spectroscopy was used to determine the densities of the metastables. It was found that even small abundances of oxygen lead to large increases in metastable density, mostly due to the reduction in the electron number density, since electron-induced quenching determines the metastable density. At abundances higher than 7% to 15% for powers between 50 and 150 W, quenching by oxygen molecules begins to dominate and the metastable density drops again.

Original language	English
Article number	145206
Number of pages	6
Journal	Journal of Physics D: Applied Physics
Volume	42
Issue number	14
DOIs	https://doi.org/10.1088/0022-3727/42/14/145206
Publication status	Published - 21 Jul 2009

Keywords

OPTICAL COMPUTERIZED-TOMOGRAPHY
H TRANSITION
FUNCTIONAL SEPARATION
EMISSION TOMOGRAPHY
DISCHARGE STRUCTURE
ICP DISCHARGE
DIAGNOSTICS
OXYGEN
GAS
DISSOCIATION

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title = "Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O-2",

abstract = "We have measured the densities of 1s(5) and 1s(3) argon metastables as a function of the abundance of molecular oxygen in an inductively coupled plasma (ICP) in mixtures of Ar and O-2. Laser absorption spectroscopy was used to determine the densities of the metastables. It was found that even small abundances of oxygen lead to large increases in metastable density, mostly due to the reduction in the electron number density, since electron-induced quenching determines the metastable density. At abundances higher than 7% to 15% for powers between 50 and 150 W, quenching by oxygen molecules begins to dominate and the metastable density drops again.",

keywords = "OPTICAL COMPUTERIZED-TOMOGRAPHY, H TRANSITION, FUNCTIONAL SEPARATION, EMISSION TOMOGRAPHY, DISCHARGE STRUCTURE, ICP DISCHARGE, DIAGNOSTICS, OXYGEN, GAS, DISSOCIATION",

author = "Y. Hayashi and S. Hirao and Y. Zhang and T. Gans and D. O'Connell and Petrovic, {Z. Lj} and T. Makabe",

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T1 - Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O-2

AU - Hayashi, Y.

AU - Hirao, S.

AU - Zhang, Y.

AU - Gans, T.

AU - O'Connell, D.

AU - Petrovic, Z. Lj

AU - Makabe, T.

PY - 2009/7/21

Y1 - 2009/7/21

N2 - We have measured the densities of 1s(5) and 1s(3) argon metastables as a function of the abundance of molecular oxygen in an inductively coupled plasma (ICP) in mixtures of Ar and O-2. Laser absorption spectroscopy was used to determine the densities of the metastables. It was found that even small abundances of oxygen lead to large increases in metastable density, mostly due to the reduction in the electron number density, since electron-induced quenching determines the metastable density. At abundances higher than 7% to 15% for powers between 50 and 150 W, quenching by oxygen molecules begins to dominate and the metastable density drops again.

AB - We have measured the densities of 1s(5) and 1s(3) argon metastables as a function of the abundance of molecular oxygen in an inductively coupled plasma (ICP) in mixtures of Ar and O-2. Laser absorption spectroscopy was used to determine the densities of the metastables. It was found that even small abundances of oxygen lead to large increases in metastable density, mostly due to the reduction in the electron number density, since electron-induced quenching determines the metastable density. At abundances higher than 7% to 15% for powers between 50 and 150 W, quenching by oxygen molecules begins to dominate and the metastable density drops again.

KW - OPTICAL COMPUTERIZED-TOMOGRAPHY

KW - H TRANSITION

KW - FUNCTIONAL SEPARATION

KW - EMISSION TOMOGRAPHY

KW - DISCHARGE STRUCTURE

KW - ICP DISCHARGE

KW - DIAGNOSTICS

KW - OXYGEN

KW - GAS

KW - DISSOCIATION

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U2 - 10.1088/0022-3727/42/14/145206

DO - 10.1088/0022-3727/42/14/145206

M3 - Article

SN - 1361-6463

VL - 42

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 14

M1 - 145206

ER -

Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O-2

Abstract

Keywords

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