TY - JOUR
T1 - Auger Electron Spectroscopy in high vacuum
T2 - Nanocharacterisation in the Scanning Electron Microscope
AU - Zha, Xiaoping
AU - Walker, Christopher G H
AU - El-Gomati, Mohamed
PY - 2014
Y1 - 2014
N2 - It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10 -6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM.
AB - It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10 -6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM.
UR - http://www.scopus.com/inward/record.url?scp=84902983803&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/522/1/012027
DO - 10.1088/1742-6596/522/1/012027
M3 - Article
AN - SCOPUS:84902983803
SN - 1742-6588
VL - 522
SP - 1
EP - 6
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
M1 - 012027
ER -