Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope

Xiaoping Zha; Christopher G H Walker; Mohamed El-Gomati

doi:10.1088/1742-6596/522/1/012027

Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope

Xiaoping Zha, Christopher G H Walker, Mohamed El-Gomati

Research output: Contribution to journal › Article › peer-review

Abstract

It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10 ^-6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM.

Original language	English
Article number	012027
Pages (from-to)	1-6
Number of pages	6
Journal	Journal of Physics: Conference Series
Volume	522
DOIs	https://doi.org/10.1088/1742-6596/522/1/012027
Publication status	Published - 2014

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title = "Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope",

abstract = "It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10 -6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM.",

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AB - It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10 -6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM.

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Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope

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