Activities per year
Abstract
The development of metamaterials operating at visible light wavelengths requires metamaterials to be produced with nanoscale structure over large areas. Improvements in the efficiency of electron beam lithography (EBL) could play an important role in accelerating this development. In this paper we show the production of a shaped probe for use in EBL. A phase structured electron wave containing vortices can be focused to produce a C-shaped cross section. Local spatial frequency analysis shows that both the gap and overall size of the C-shape can be easily controlled. We present the generation of such a C-shaped electron beam using a holographic binary amplitude diffraction mask. Thin AlF3 film is exposed to the C-shaped diffraction order and demonstrates the facile production of both a metallic C-shaped structure as well as the etching of a C-shaped hole.© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Original language | English |
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Title of host publication | Laser Beam Shaping XVI |
Editors | Andrew Forbes, Todd E. Lizotte |
Place of Publication | California, United States |
Publisher | SPIE |
Volume | 9581 |
ISBN (Print) | 0277-786X |
DOIs | |
Publication status | Published - 2015 |
Activities
- 1 Conference participation
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ICOAM 2015
Yuan, J. (Speaker)
4 Aug 2015 → 7 Aug 2015Activity: Participating in or organising an event › Conference participation