Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry

Bastien Bruneau, P Diomede, DJ Economou, S Longo, Timo Gans, Deborah O'Connell, Arthur Greb, Erik V. Johnson, Jean-Paul Booth

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Parallel plate capacitively coupled plasmas in hydrogen at relatively high pressure (~1 Torr) are excited with tailored voltage waveforms containing up to five frequencies. Predictions of a hybrid model combining a particle-in-cell simulation with Monte Carlo collisions and a fluid model are compared to phase resolved optical emission spectroscopy measurements, yielding information on the dynamics of the excitation rate in these discharges. When the discharge is excited with amplitude asymmetric waveforms, the discharge becomes electrically asymmetric, with different ion energies at each of the two electrodes. Unexpectedly, large differences in the $\text{H}_{2}^{+}$ fluxes to each of the two electrodes are caused by the different $\text{H}_{3}^{+}$ energies. When the discharge is excited with slope asymmetric waveforms, only weak electrical asymmetry of the discharge is observed. In this case, electron power absorption due to fast sheath expansion at one electrode is balanced by electron power absorption at the opposite electrode due to a strong electric field reversal.
Original languageEnglish
Article number045019
Pages (from-to)1-9
Number of pages9
JournalPlasma sources science & technology
Issue number4
Publication statusPublished - 8 Jul 2016

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