Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes

Ashish Suri; Andrew Pratt; Steven Philip Tear; Christopher George Havelock Walker; Mohamed M El Gomati

doi:10.1088/1742-6596/902/1/012017

Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes

Ashish Suri, Andrew Pratt, Steven Philip Tear, Christopher George Havelock Walker, Mohamed M El Gomati

Research output: Contribution to journal › Article › peer-review

Abstract

We report the design and experimental characterisation of a miniature detector for the scanning electron microscope based on the Bessel Box (BB) electron energy analyser which has a simple cylindrical geometry. We report on the simulation and operation of a prototype BB. The energy resolution of a single BB has been numerically calculated and experimentally characterised to be < 1%. This miniature electron detector is designed to be used close to the sample, alleviating the effects of the ambient electrostatic and magnetic fields.

Original language	English
Article number	012017
Journal	Journal of Physics: Conference Series
Volume	902
DOIs	https://doi.org/10.1088/1742-6596/902/1/012017
Publication status	Published - Sept 2017

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10.1088/1742-6596/902/1/012017Licence: CC BY

Characterization of a Miniature Electron Energy Analyzer for Scanning Electron MicroscopesFinal published version, 783 KBLicence: CC BY

Cite this

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title = "Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes",

abstract = "We report the design and experimental characterisation of a miniature detector for the scanning electron microscope based on the Bessel Box (BB) electron energy analyser which has a simple cylindrical geometry. We report on the simulation and operation of a prototype BB. The energy resolution of a single BB has been numerically calculated and experimentally characterised to be < 1%. This miniature electron detector is designed to be used close to the sample, alleviating the effects of the ambient electrostatic and magnetic fields.",

author = "Ashish Suri and Andrew Pratt and Tear, {Steven Philip} and Walker, {Christopher George Havelock} and {El Gomati}, {Mohamed M}",

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AU - El Gomati, Mohamed M

PY - 2017/9

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AB - We report the design and experimental characterisation of a miniature detector for the scanning electron microscope based on the Bessel Box (BB) electron energy analyser which has a simple cylindrical geometry. We report on the simulation and operation of a prototype BB. The energy resolution of a single BB has been numerically calculated and experimentally characterised to be < 1%. This miniature electron detector is designed to be used close to the sample, alleviating the effects of the ambient electrostatic and magnetic fields.

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DO - 10.1088/1742-6596/902/1/012017

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