Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes

Ashish Suri, Andrew Pratt, Steven Philip Tear, Christopher George Havelock Walker, Mohamed M El Gomati

Research output: Contribution to journalArticlepeer-review


We report the design and experimental characterisation of a miniature detector for the scanning electron microscope based on the Bessel Box (BB) electron energy analyser which has a simple cylindrical geometry. We report on the simulation and operation of a prototype BB. The energy resolution of a single BB has been numerically calculated and experimentally characterised to be < 1%. This miniature electron detector is designed to be used close to the sample, alleviating the effects of the ambient electrostatic and magnetic fields.
Original languageEnglish
Article number012017
JournalJournal of Physics: Conference Series
Publication statusPublished - Sept 2017

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