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Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes

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JournalJournal of Physics: Conference Series
DatePublished - Sep 2017
Volume902
Original languageEnglish

Abstract

We report the design and experimental characterisation of a miniature detector for the scanning electron microscope based on the Bessel Box (BB) electron energy analyser which has a simple cylindrical geometry. We report on the simulation and operation of a prototype BB. The energy resolution of a single BB has been numerically calculated and experimentally characterised to be < 1%. This miniature electron detector is designed to be used close to the sample, alleviating the effects of the ambient electrostatic and magnetic fields.

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