Chemical kinetics and reactive species in atmospheric pressure helium–oxygen plasmas with humid-air impurities

Tomoyuki Murakami, Kari Niemi, Timo Gans, Deborah O'Connell, William G Graham

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In most applications helium-based plasma jets operate in an open-air environment. The presence of humid air in the plasma jet will influence the plasma chemistry and can lead to the production of a broader range of reactive species. We explore the influence of humid air on the reactive species in radio frequency (rf)-driven atmospheric-pressure helium–oxygen mixture plasmas (He–O2, helium with 5000 ppm admixture of oxygen) for wide air impurity levels of 0–500 ppm with relative humidities of from 0% to 100% using a zero-dimensional, time-dependent global model. Comparisons are made with experimental measurements in an rf-driven micro-scale atmospheric pressure plasma jet and with one-dimensional semi-kinetic simulations of the same plasma jet. These suggest that the plausible air impurity level is not more than hundreds of ppm in such systems. The evolution of species concentration is
described for reactive oxygen species, metastable species, radical species and positively and negatively charged ions (and their clusters). Effects of the air impurity containing water humidity on electronegativity and overall plasma reactivity are clarified with particular emphasis on reactive oxygen species.
Original languageEnglish
Article number015003
Pages (from-to)1-29
Number of pages29
JournalPlasma sources science & technology
Issue number1
Publication statusPublished - Feb 2013

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