Closed-loop tracking of amplitude and frequency in a mode-localized resonant MEMS sensor

Milind Pandit, Chun Zhao, Guillermo Sobreviela, Aref Mustafazade, Ashwin A. Seshia

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, the amplitude and frequency stability of a mode-localized sensor are characterized in a closed loop setup. The system describes an absolute amplitude ratio sensitivity of 5250 to stiffness perturbations in linear operation. A stability of 432ppm at 500s integration time is observed for amplitude ratio measurements. A resolution of 85ppb corresponding to normalised stiffness perturbations in amplitude ratio measurements is thus demonstrated at 500s integration time. Comparisons to frequency shift sensing within the same device shows that amplitude ratio sensing provides higher accuracies for long term measurements due to intrinsic common mode rejection properties in a mode-localized system.

Original languageEnglish
Title of host publication2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings
PublisherIEEE
Pages510-513
Number of pages4
ISBN (Electronic)9781538629161
DOIs
Publication statusPublished - 27 Oct 2017
Event2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Besancon, France
Duration: 9 Jul 201713 Jul 2017

Publication series

Name2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings

Conference

Conference2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017
Country/TerritoryFrance
CityBesancon
Period9/07/1713/07/17

Bibliographical note

Funding Information:
V. ACKNOWLEDGEMENT This work is supported by funding from Innovate UK and Natural Environment Research Council.

Publisher Copyright:
© 2017 IEEE.

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