Combination of scanning Auger and very-low-energy electron microscopy

M M El-Gomati; I Mullerova; L Frank

Combination of scanning Auger and very-low-energy electron microscopy

M M El-Gomati, I Mullerova, L Frank

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The problem of obtaining localised information from solids by electrons is discussed and arguments in favour of scanning Auger electron microscopy (SAM) and scanning very-low-energy electron microscopy (SLEEM) are given. Examples highlighting the problems of using either of these methods alone are shown which demonstrate the need to combine both techniques. A novel mini-held emission all electrostatic column has been developed for use as the electron probe for a combined SAM/SLEEM system. The column comprises all the lenses and a novel SLEEM detector based on the cathode lens principle. The whole system measures 92 mm in length and fits inside a cylindrical mirror analyser. A series of micrographs demonstrating the principle of the SLEEM detection from a composite sample of Au, Al and C obtained with electron energies over the range 13-5000 eV is given.

Original language	English
Title of host publication	ELECTRON
Editors	A Kirkland, PD Brown
Place of Publication	LONDON
Publisher	INST MATERIALS
Pages	326-333
Number of pages	2
ISBN (Print)	1-86125-051-7
Publication status	Published - 1998
Event	International Centennial Symposium on the Electron - CAMBRIDGE Duration: 15 Sept 1997 → 17 Sept 1997

Conference

Conference	International Centennial Symposium on the Electron
City	CAMBRIDGE
Period	15/09/97 → 17/09/97

Keywords

CATHODE LENS

Cite this

@inproceedings{f9147f17c8a54f49838dd4c81c6e231d,

title = "Combination of scanning Auger and very-low-energy electron microscopy",

abstract = "The problem of obtaining localised information from solids by electrons is discussed and arguments in favour of scanning Auger electron microscopy (SAM) and scanning very-low-energy electron microscopy (SLEEM) are given. Examples highlighting the problems of using either of these methods alone are shown which demonstrate the need to combine both techniques. A novel mini-held emission all electrostatic column has been developed for use as the electron probe for a combined SAM/SLEEM system. The column comprises all the lenses and a novel SLEEM detector based on the cathode lens principle. The whole system measures 92 mm in length and fits inside a cylindrical mirror analyser. A series of micrographs demonstrating the principle of the SLEEM detection from a composite sample of Au, Al and C obtained with electron energies over the range 13-5000 eV is given.",

keywords = "CATHODE LENS",

author = "El-Gomati, {M M} and I Mullerova and L Frank",

year = "1998",

language = "English",

isbn = "1-86125-051-7",

pages = "326--333",

editor = "A Kirkland and PD Brown",

booktitle = "ELECTRON",

publisher = "INST MATERIALS",

note = "International Centennial Symposium on the Electron ; Conference date: 15-09-1997 Through 17-09-1997",

}

TY - GEN

T1 - Combination of scanning Auger and very-low-energy electron microscopy

AU - El-Gomati, M M

AU - Mullerova, I

AU - Frank, L

PY - 1998

Y1 - 1998

N2 - The problem of obtaining localised information from solids by electrons is discussed and arguments in favour of scanning Auger electron microscopy (SAM) and scanning very-low-energy electron microscopy (SLEEM) are given. Examples highlighting the problems of using either of these methods alone are shown which demonstrate the need to combine both techniques. A novel mini-held emission all electrostatic column has been developed for use as the electron probe for a combined SAM/SLEEM system. The column comprises all the lenses and a novel SLEEM detector based on the cathode lens principle. The whole system measures 92 mm in length and fits inside a cylindrical mirror analyser. A series of micrographs demonstrating the principle of the SLEEM detection from a composite sample of Au, Al and C obtained with electron energies over the range 13-5000 eV is given.

AB - The problem of obtaining localised information from solids by electrons is discussed and arguments in favour of scanning Auger electron microscopy (SAM) and scanning very-low-energy electron microscopy (SLEEM) are given. Examples highlighting the problems of using either of these methods alone are shown which demonstrate the need to combine both techniques. A novel mini-held emission all electrostatic column has been developed for use as the electron probe for a combined SAM/SLEEM system. The column comprises all the lenses and a novel SLEEM detector based on the cathode lens principle. The whole system measures 92 mm in length and fits inside a cylindrical mirror analyser. A series of micrographs demonstrating the principle of the SLEEM detection from a composite sample of Au, Al and C obtained with electron energies over the range 13-5000 eV is given.

KW - CATHODE LENS

M3 - Conference contribution

SN - 1-86125-051-7

SP - 326

EP - 333

BT - ELECTRON

A2 - Kirkland, A

A2 - Brown, PD

PB - INST MATERIALS

CY - LONDON

T2 - International Centennial Symposium on the Electron

Y2 - 15 September 1997 through 17 September 1997

ER -