Commissioning and initial experiments of an EUV capillary discharge laser

Sarah Wilson; Greg Tallents

doi:10.1364/EUVXRAY.2018.ET1B.7

Commissioning and initial experiments of an EUV capillary discharge laser

Sarah Wilson^*, Greg Tallents

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The commissioning and initial experiments with an extreme ultra-violet (EUV) capillary discharge laser (46.9nm) are presented. We investigate the reflectivity and focusability of gold mirrors at 46.9nm and the ability of the EUV laser to ablate solid targets.

Original language	English
Title of host publication	Compact EUV and X-ray Light Sources, EUVXRAY 2018
Publisher	OSA - The Optical Society
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/EUVXRAY.2018.ET1B.7
Publication status	Published - 2018
Event	Compact EUV and X-ray Light Sources, EUVXRAY 2018 - Strasbourg, France Duration: 26 Mar 2017 → 28 Mar 2017

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F85-EUVXRAY 2018

Conference

Conference	Compact EUV and X-ray Light Sources, EUVXRAY 2018
Country/Territory	France
City	Strasbourg
Period	26/03/17 → 28/03/17

Bibliographical note

Publisher Copyright:
© OSA 2018.

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10.1364/EUVXRAY.2018.ET1B.7

Cite this

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title = "Commissioning and initial experiments of an EUV capillary discharge laser",

abstract = "The commissioning and initial experiments with an extreme ultra-violet (EUV) capillary discharge laser (46.9nm) are presented. We investigate the reflectivity and focusability of gold mirrors at 46.9nm and the ability of the EUV laser to ablate solid targets.",

author = "Sarah Wilson and Greg Tallents",

note = "Publisher Copyright: {\textcopyright} OSA 2018.; Compact EUV and X-ray Light Sources, EUVXRAY 2018 ; Conference date: 26-03-2017 Through 28-03-2017",

year = "2018",

doi = "10.1364/EUVXRAY.2018.ET1B.7",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "OSA - The Optical Society",

booktitle = "Compact EUV and X-ray Light Sources, EUVXRAY 2018",

}

Wilson, S & Tallents, G 2018, Commissioning and initial experiments of an EUV capillary discharge laser. in Compact EUV and X-ray Light Sources, EUVXRAY 2018. Optics InfoBase Conference Papers, vol. Part F85-EUVXRAY 2018, OSA - The Optical Society, Compact EUV and X-ray Light Sources, EUVXRAY 2018, Strasbourg, France, 26/03/17. https://doi.org/10.1364/EUVXRAY.2018.ET1B.7

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AU - Wilson, Sarah

AU - Tallents, Greg

PY - 2018

Y1 - 2018

N2 - The commissioning and initial experiments with an extreme ultra-violet (EUV) capillary discharge laser (46.9nm) are presented. We investigate the reflectivity and focusability of gold mirrors at 46.9nm and the ability of the EUV laser to ablate solid targets.

AB - The commissioning and initial experiments with an extreme ultra-violet (EUV) capillary discharge laser (46.9nm) are presented. We investigate the reflectivity and focusability of gold mirrors at 46.9nm and the ability of the EUV laser to ablate solid targets.

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U2 - 10.1364/EUVXRAY.2018.ET1B.7

DO - 10.1364/EUVXRAY.2018.ET1B.7

M3 - Conference contribution

AN - SCOPUS:85047161374

T3 - Optics InfoBase Conference Papers

BT - Compact EUV and X-ray Light Sources, EUVXRAY 2018

PB - OSA - The Optical Society

T2 - Compact EUV and X-ray Light Sources, EUVXRAY 2018

Y2 - 26 March 2017 through 28 March 2017

ER -

Commissioning and initial experiments of an EUV capillary discharge laser

Abstract

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Bibliographical note

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