Comparative study of different output metrics for a three weakly coupled resonator sensor

C. Zhao; G. S. Wood; J. Xie; H. Chang; S. H. Pu; M. Kraft

doi:10.1109/TRANSDUCERS.2015.7181396

Comparative study of different output metrics for a three weakly coupled resonator sensor

C. Zhao, G. S. Wood, J. Xie, H. Chang, S. H. Pu, M. Kraft

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper, for the first time, investigates the characteristics of different output metrics for a three degreeof- freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from theoretical estimations, equivalent RLC circuit model simulations and electrical measurements that using the vibration amplitude ratio as an output signal provides improved sensitivity and linearity range, compared to other methods such as shift in eigenstate, mode frequency or amplitude difference.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	IEEE
Pages	2196-2199
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181396
Publication status	Published - 5 Aug 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: 21 Jun 2015 → 25 Jun 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	21/06/15 → 25/06/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

linear range
linear sensitivity
MEMS coupled resonator sensor
output metrics

Access to Document

10.1109/TRANSDUCERS.2015.7181396

Cite this

Zhao, C., Wood, G. S., Xie, J., Chang, H., Pu, S. H., & Kraft, M. (2015). Comparative study of different output metrics for a three weakly coupled resonator sensor. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 2196-2199). Article 7181396 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). IEEE. https://doi.org/10.1109/TRANSDUCERS.2015.7181396

Zhao, C. ; Wood, G. S. ; Xie, J. et al. / Comparative study of different output metrics for a three weakly coupled resonator sensor. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. IEEE, 2015. pp. 2196-2199 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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title = "Comparative study of different output metrics for a three weakly coupled resonator sensor",

abstract = "This paper, for the first time, investigates the characteristics of different output metrics for a three degreeof- freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from theoretical estimations, equivalent RLC circuit model simulations and electrical measurements that using the vibration amplitude ratio as an output signal provides improved sensitivity and linearity range, compared to other methods such as shift in eigenstate, mode frequency or amplitude difference.",

keywords = "linear range, linear sensitivity, MEMS coupled resonator sensor, output metrics",

author = "C. Zhao and Wood, {G. S.} and J. Xie and H. Chang and Pu, {S. H.} and M. Kraft",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",

year = "2015",

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doi = "10.1109/TRANSDUCERS.2015.7181396",

language = "English",

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Zhao, C, Wood, GS, Xie, J, Chang, H, Pu, SH & Kraft, M 2015, Comparative study of different output metrics for a three weakly coupled resonator sensor. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181396, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, IEEE, pp. 2196-2199, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 21/06/15. https://doi.org/10.1109/TRANSDUCERS.2015.7181396

Comparative study of different output metrics for a three weakly coupled resonator sensor. / Zhao, C.; Wood, G. S.; Xie, J. et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. IEEE, 2015. p. 2196-2199 7181396 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Comparative study of different output metrics for a three weakly coupled resonator sensor

AU - Zhao, C.

AU - Wood, G. S.

AU - Xie, J.

AU - Chang, H.

AU - Pu, S. H.

AU - Kraft, M.

PY - 2015/8/5

Y1 - 2015/8/5

N2 - This paper, for the first time, investigates the characteristics of different output metrics for a three degreeof- freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from theoretical estimations, equivalent RLC circuit model simulations and electrical measurements that using the vibration amplitude ratio as an output signal provides improved sensitivity and linearity range, compared to other methods such as shift in eigenstate, mode frequency or amplitude difference.

AB - This paper, for the first time, investigates the characteristics of different output metrics for a three degreeof- freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from theoretical estimations, equivalent RLC circuit model simulations and electrical measurements that using the vibration amplitude ratio as an output signal provides improved sensitivity and linearity range, compared to other methods such as shift in eigenstate, mode frequency or amplitude difference.

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KW - linear sensitivity

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Zhao C, Wood GS, Xie J, Chang H, Pu SH, Kraft M. Comparative study of different output metrics for a three weakly coupled resonator sensor. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. IEEE. 2015. p. 2196-2199. 7181396. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7181396

Comparative study of different output metrics for a three weakly coupled resonator sensor

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