Abstract
A global model of a homogeneous plasma bulk oscillating between electron-free radio-frequency (rf) sheaths is developed. Particle and power balance, including ohmic heating loss for bulk-electrons and ions in the sheaths, yield the bulk electron temperature and density. Explicit time dependence of the reduced bulk electric field and correspondingly of the total ionization rate and electron transport coefficients is accounted for. Results for a gas mixture of 0.5 vol% oxygen in helium at atmospheric pressure within a 1mm discharge gap as a function of the 13.56MHz rf power density are presented and compared with a semi-kinetic 1D-fluid simulation. The quality of agreement is critically analyzed and correlated with the individual global model assumptions.
| Original language | English |
|---|---|
| Article number | 032001 |
| Pages (from-to) | 1-5 |
| Number of pages | 5 |
| Journal | Plasma sources science & technology |
| Volume | 22 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Jun 2013 |