Comparison of interface structure of thin miscible films by grazing incidence x-ray scattering and high-resolution electron microscopy

T P A Hase, E M Ho, J J Freijo, S M Thompson, A K Petford-Long, B K Tanner

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Grazing incidence x-ray scattering and cross-sectional high-resolution electron microscopy (HREM) have been applied to the study of thin trilayers of the miscible system Co-Cr-Co grown by ultra-high vacuum evaporation on silicon. Good agreement was found between numerical values for layer thickness deduced by the two techniques. The Co-Cr interface roughness was found to be low with substantial interdiffusion, significantly greater than the roughness amplitude. HREM images confirmed the diffuseness of the interfaces. The roughness had a lateral correlation length of typically 150 Angstrom and a very low fractal parameter h of 0.15. The correlation length was always found to Correspond to the lateral grain size observed in the HREM images.

Original languageEnglish
Pages (from-to)A231-A235
Number of pages5
JournalJournal of Physics D: Applied Physics
Issue number10A
Publication statusPublished - 21 May 2003



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