Control and analysis of grain size in sputtered NiFe thin films

Gonzalo Vallejo Fernandez, Phil J. Grundy, Melvin Vopson

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In this paper we describe a method for deposition of ferromagnetic thin films with controlled grain size and distribution. The close control of grain size without the use of seed layers is demonstrated for NiFe – permalloy films by using a novel sputtering technology. We also present a detailed analysis of the grain size distribution based on the cumulative percentage technique. This is a more convenient mathematical approach to the study of particle size distributions as it gives consistent results even for a small number of particles.
Original languageEnglish
Pages (from-to)6-9
JournalJournal of Condensed Matter Physics
Issue number1
Publication statusPublished - 2013

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