Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number115007
Number of pages12
JournalPlasma sources science & technology
Volume26
Issue number11
Early online date20 Sept 2017
DOIs
Publication statusPublished - 24 Oct 2017

Bibliographical note

© 2017 IOP Publishing Ltd.

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