Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

Scott Doyle; Andrew Robert Gibson; Rod Boswell; Christine Charles; James Peter Dedrick

doi:10.1088/1361-6595/abc82f

Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

Scott Doyle, Andrew Robert Gibson, Rod Boswell, Christine Charles, James Peter Dedrick

Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	124002
Number of pages	13
Journal	Plasma Sources Science and Technology
Volume	29
Issue number	12
DOIs	https://doi.org/10.1088/1361-6595/abc82f
Publication status	Published - 16 Dec 2020

Bibliographical note

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10.1088/1361-6595/abc82f

Doyle2020a_AcceptedManuscript
© 2020 IOP Publishing Ltd. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy.
Accepted author manuscript, 1.29 MBLicence: CC BY-NC-ND

Physics Research Equipment Fund: Tailored-voltage waveforms for a new generation of electrically asymmetric plasma thrusters
Dedrick, J. P. (Principal investigator)
3/08/15 → 3/08/20
Project: Research project (funded) › Internal pump-priming

Cite this

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title = "Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms",

author = "Scott Doyle and Gibson, {Andrew Robert} and Rod Boswell and Christine Charles and Dedrick, {James Peter}",

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T1 - Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

AU - Doyle, Scott

AU - Gibson, Andrew Robert

AU - Boswell, Rod

AU - Charles, Christine

AU - Dedrick, James Peter

PY - 2020/12/16

Y1 - 2020/12/16

U2 - 10.1088/1361-6595/abc82f

DO - 10.1088/1361-6595/abc82f

M3 - Article

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VL - 29

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

IS - 12

M1 - 124002

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Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

Bibliographical note

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Projects

Physics Research Equipment Fund: Tailored-voltage waveforms for a new generation of electrically asymmetric plasma thrusters

Cite this