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Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

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JournalPlasma Sources Science and Technology
DateSubmitted - 12 Jun 2020
DateAccepted/In press - 6 Nov 2020
DatePublished (current) - 16 Dec 2020
Issue number12
Volume29
Number of pages13
Original languageEnglish

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