Determination of the degree of dissociation in an inductively coupled hydrogen plasma using optical emission spectroscopy and laser diagnostics

M. Abdel-Rahman; V. Schulz-von der Gathen; T. Gans; K. Niemi; H. F. Doebele

doi:10.1088/0963-0252/15/4/005

Determination of the degree of dissociation in an inductively coupled hydrogen plasma using optical emission spectroscopy and laser diagnostics

M. Abdel-Rahman, V. Schulz-von der Gathen, T. Gans, K. Niemi, H. F. Doebele

Physics

Research output: Contribution to journal › Article › peer-review

Abstract

The knowledge of absolute concentrations of radicals in molecular discharges, such as the density of atomic hydrogen in H-2 plasmas, is crucial for understanding processes at the surface and is, therefore, of great interest in a variety of plasma applications. Reliable spectroscopic methods are indispensable for the determination of the degree of dissociation in processing plasmas. In this paper, we describe a novel optical emission spectroscopy method called two-gas actinometry (TGA). It is based on using a second actinometer gas to take into account dissociative excitation, which is of particular importance at comparatively low degrees of dissociation. TGA is employed for measuring the characteristic dependence of the degree of dissociation, in a wide range of plasma parameters, in an inductively coupled radio-frequency hydrogen plasma. Absolute densities with high accuracy are obtained using two-photon absorption laser-induced fluorescence spectroscopy.

Original language	English
Pages (from-to)	620-626
Number of pages	7
Journal	Plasma sources science & technology
Volume	15
Issue number	4
DOIs	https://doi.org/10.1088/0963-0252/15/4/005
Publication status	Published - Nov 2006

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10.1088/0963-0252/15/4/005

Cite this

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title = "Determination of the degree of dissociation in an inductively coupled hydrogen plasma using optical emission spectroscopy and laser diagnostics",

abstract = "The knowledge of absolute concentrations of radicals in molecular discharges, such as the density of atomic hydrogen in H-2 plasmas, is crucial for understanding processes at the surface and is, therefore, of great interest in a variety of plasma applications. Reliable spectroscopic methods are indispensable for the determination of the degree of dissociation in processing plasmas. In this paper, we describe a novel optical emission spectroscopy method called two-gas actinometry (TGA). It is based on using a second actinometer gas to take into account dissociative excitation, which is of particular importance at comparatively low degrees of dissociation. TGA is employed for measuring the characteristic dependence of the degree of dissociation, in a wide range of plasma parameters, in an inductively coupled radio-frequency hydrogen plasma. Absolute densities with high accuracy are obtained using two-photon absorption laser-induced fluorescence spectroscopy.",

author = "M. Abdel-Rahman and {Schulz-von der Gathen}, V. and T. Gans and K. Niemi and Doebele, {H. F.}",

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TY - JOUR

T1 - Determination of the degree of dissociation in an inductively coupled hydrogen plasma using optical emission spectroscopy and laser diagnostics

AU - Abdel-Rahman, M.

AU - Schulz-von der Gathen, V.

AU - Gans, T.

AU - Niemi, K.

AU - Doebele, H. F.

PY - 2006/11

Y1 - 2006/11

N2 - The knowledge of absolute concentrations of radicals in molecular discharges, such as the density of atomic hydrogen in H-2 plasmas, is crucial for understanding processes at the surface and is, therefore, of great interest in a variety of plasma applications. Reliable spectroscopic methods are indispensable for the determination of the degree of dissociation in processing plasmas. In this paper, we describe a novel optical emission spectroscopy method called two-gas actinometry (TGA). It is based on using a second actinometer gas to take into account dissociative excitation, which is of particular importance at comparatively low degrees of dissociation. TGA is employed for measuring the characteristic dependence of the degree of dissociation, in a wide range of plasma parameters, in an inductively coupled radio-frequency hydrogen plasma. Absolute densities with high accuracy are obtained using two-photon absorption laser-induced fluorescence spectroscopy.

AB - The knowledge of absolute concentrations of radicals in molecular discharges, such as the density of atomic hydrogen in H-2 plasmas, is crucial for understanding processes at the surface and is, therefore, of great interest in a variety of plasma applications. Reliable spectroscopic methods are indispensable for the determination of the degree of dissociation in processing plasmas. In this paper, we describe a novel optical emission spectroscopy method called two-gas actinometry (TGA). It is based on using a second actinometer gas to take into account dissociative excitation, which is of particular importance at comparatively low degrees of dissociation. TGA is employed for measuring the characteristic dependence of the degree of dissociation, in a wide range of plasma parameters, in an inductively coupled radio-frequency hydrogen plasma. Absolute densities with high accuracy are obtained using two-photon absorption laser-induced fluorescence spectroscopy.

U2 - 10.1088/0963-0252/15/4/005

DO - 10.1088/0963-0252/15/4/005

M3 - Article

VL - 15

SP - 620

EP - 626

JO - Plasma sources science & technology

JF - Plasma sources science & technology

SN - 0963-0252

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