Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

TY - JOUR

T1 - Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

AU - Zhou, Xin

AU - Zhao, Chun

AU - Xiao, Dingbang

AU - Sun, Jiangkun

AU - Sobreviela, Guillermo

AU - Gerrard, Dustin D.

AU - Chen, Yunhan

AU - Flader, Ian

AU - Kenny, Thomas W.

AU - Wu, Xuezhong

AU - Seshia, Ashwin A.

N1 - Funding Information: We thank Sijun Du, Milind Pandit, Malar Chellasivalingam, and Atif Aziz for helpful discussions and assisting with training on laboratory equipment. This work is partly supported by the National Key R&D Program of China (NKPs) (2018YFB2002304) and the National Natural Science Foundation of China (NSFC) (51905539, 51575521 and 51705527). Experimental devices are designed and fabricated in the nano@Stanford labs, which are supported by the NSF as part of the National Nanotechnology Coordinated Infrastructure under award ECCS-1542152, with support from the Defense Advanced Research Projects Agency Precise Robust Inertial Guidance for Munitions (PRIGM) Program, managed by Dr. Robert Lutwak and Dr. Ron Polcawich, and the NSF under grant number CMMI-1662464. This work is primarily supported by the UK Natural Environment Research Council under grant number NE/N012097/1. Publisher Copyright: © 2019, The Author(s).

PY - 2019/10/31

Y1 - 2019/10/31

N2 - Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. Electrostatic pump based sideband coupling is demonstrated, and compared to conventional strain-mediated sideband operations. Electrostatic coupling is shown to be very efficient, enabling strong, tunable dynamical coupling.

AB - Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. Electrostatic pump based sideband coupling is demonstrated, and compared to conventional strain-mediated sideband operations. Electrostatic coupling is shown to be very efficient, enabling strong, tunable dynamical coupling.

UR - http://www.scopus.com/inward/record.url?scp=85074252519&partnerID=8YFLogxK

U2 - 10.1038/s41467-019-12796-0

DO - 10.1038/s41467-019-12796-0

M3 - Article

C2 - 31672971

AN - SCOPUS:85074252519

SN - 2041-1723

VL - 10

JO - Nature Communications

JF - Nature Communications

IS - 1

M1 - 4980

ER -